FOUP Filter Module With Snap-Fit Retention for Low Pressure Drop
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Solution Overview
Problem
Purge assemblies for wafer containers, such as FOUPs, have multiple discrete components including grommets, filters, and sealing members, which can obstruct flow and require welding, leading to potential particle generation and contamination.
Innovation Solution
A filter module using a resilient interface body and a snap-fit filter retainer, eliminating the need for welding and reducing occlusion, thereby improving flow and reducing pressure drop.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If welding is used to secure the filter, then the filter is firmly retained, but particle generation and contamination occur
Solution Approach 1:
The patent replaces the welding process (thermal/mechanical system) with a mechanical retention system consisting of a filter retainer and retention elements. The filter is secured through mechanical interlocking features such as clips, lugs, or interference fits between the filter retainer and filter housing, eliminating the harmful thermal and mechanical effects of welding that generate particles and contamination.
2Reliability
If filter grill is used to retain filter, then filter is held in place, but flow is obstructed by the grill structure
Solution Approach 1:
The patent segments the filter retention structure into discrete retention elements (such as individual clips, lugs, or localized retention features) distributed around the filter perimeter, rather than using a continuous grill structure. This segmentation allows gas flow to pass through the gaps between retention elements, maintaining high flow rates while still providing secure filter retention through the cumulative effect of multiple localized retention points.
3Adaptability or versatility
If multiple discrete components are used in purge assembly, then each component can be optimized, but construction complexity increases and sealing elements may be omitted
Solution Approach 1:
The patent merges multiple discrete components (filter retainer, retention elements, sealing features) into a single integrated filter retainer assembly. This unified structure combines the functions of retention, sealing, and structural support in one component that snaps onto the filter housing, reducing assembly complexity while maintaining the optimized functions of each individual feature through careful design of the integrated structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution simplifies construction, reduces vibration and contamination risks, and enhances the effective surface area of the filter, improving gas exchange efficiency in wafer containers.
Implementation Method 1
The interface body is made from a resilient material and configured to form a seal at a perimeter of the gas exchange port
Implementation Method 2
The filter housing can include a valve, such as a check valve, to control a direction of flow through the filter module
Data Source
AI summary
A filter module includes an interface body and a filter retention body. A filter can be disposed between the filter retention body and a filter retainer joined to the filter retention body. The filter retention body can further include a valve. The filter retainer can be joined to the filter retention body by a snap fit, a press-fit, or a weld. The filter retainer can include stand-offs configured to contact the filter such that the filter is held away from the filter grill. The filter module can be used for providing purge in a wafer container such as a front opening unified pod (FOUP).