FOUP Robotic Flange Circular-Arc Snap-Hook Design
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Solution Overview
Problem
The existing lock-fastening structures for robotic flanges in Front Opening Unified Pods (FOUPs) suffer from abrasion and particle issues due to friction, and often result in reverse fixing, which hinders automation machine gripping.
Innovation Solution
A FOUP with a robotic flange featuring a circular-arc snap-hook and snap-slot design, combined with a foolproof structure using a hemi-circular snap-hook and sliding portion, ensures secure fixation and prevents reverse attachment, allowing easy automation gripping.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If linear grooves and linear snap-hooks are used for fixing the robotic flange, then the robotic flange can be attached to the FOUP, but abrasion and particles occur due to friction
Solution Approach 1:
The patent replaces linear grooves with circular-arc snap-hooks and circular-arc snap-slots. The curved geometry allows the snap-hook to engage with the snap-slot in a rotating motion rather than linear sliding, significantly reducing friction and preventing abrasion and particle generation while maintaining secure fixation.
2Ease of manufacture
If only linear grooves are used for fixing the robotic flange, then attachment is possible, but the robotic flange may be reversely fixed to the FOUP
Solution Approach 1:
The patent employs asymmetric design where the circular-arc snap-hook has a specific orientation that only fits into the corresponding snap-slot in one direction. The geometric hole and protruding portion create a foolproof structure that prevents reverse attachment, ensuring the robotic flange is always correctly oriented for automation machine gripping.
3Reliability
If the robotic flange is reversely fixed to the FOUP, then attachment occurs, but the automation machine cannot grip the robotic flange
Solution Approach 1:
The foolproof structure with the geometric hole and protruding portion performs preliminary orientation correction during the attachment process. Before the snap-hook engages with the snap-slot, the protruding portion must align with and pass through the geometric hole, which inherently orients the robotic flange correctly and prevents reverse fixation that would hinder automation gripping.
Data Source
AI summary
A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body.