FOUP Latch Structure with Rotary Drive and Sliding Rollers
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Solution Overview
Problem
Conventional front opening unified pods (FOUPs) face issues with distortion and cracking of large-sized wafer containers due to stress from polymer materials, inadequate cushioning during transportation, complex mechanical structures prone to breakdown, and contamination, as well as weight distribution problems with overhead hoist systems, leading to potential damage and loss during handling and storage.
Innovation Solution
A FOUP design featuring a latch structure with circular rotary drives and sliding devices for secure locking and unlocking, rollers to prevent dust generation, and an overhead hoist pad to distribute weight evenly, along with a calibration system to prevent distortion and additional support structures to enhance stability and safety during handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a large-sized wafer container is formed by one-piece injection molding using polymer material, then the container body can be formed with integrated sockets and wafer supporting pieces, but the stress induced by the polymer material causes distortion of the container body and distorted wafer supporting pieces, leading to tilted wafer positions and potential cracks
Solution Approach 1:
The container body is divided into multiple components: the main container body, separate wafer supporting pieces, and a door assembly with retaining components. This segmentation allows each component to be manufactured and assembled independently, reducing the stress-induced distortion problems associated with one-piece injection molding of large structures.
Solution Approach 2:
The patent changes the manufacturing parameters and materials used for different components. Specifically, the door assembly and retaining components use different materials and construction methods than the container body, allowing optimization of each component's properties to reduce overall distortion and improve precision.
2Device complexity
If retaining components are fixed to the door, then the door structure is simplified, but the fixed retaining components lack cushioning capability, causing vibration during transportation of large-sized wafers to result in cracks
Solution Approach 1:
The retaining components are designed to be movable rather than fixed, allowing them to dynamically adjust and cushion vibrations during transportation. The retaining components can move independently within the door assembly, providing shock absorption while maintaining structural simplicity.
Solution Approach 2:
The door assembly includes cushioning elements positioned to absorb vibrations before they reach the wafers. This beforehand cushioning prevents vibration-induced cracks while maintaining a relatively simple door structure through strategic placement of damping materials.
3Ease of operation
If a conventional latch structure with complex mechanical structures is used, then the door can be locked and unlocked, but the complex structures are more susceptible to breakdown and friction that leads to contamination of wafers
Solution Approach 1:
The latch structure removes complex mechanical components that are prone to breakdown and friction. The design extracts only the essential locking function, using simpler mechanisms that reduce the risk of contamination while maintaining ease of operation.
Solution Approach 2:
The patent replaces complex mechanical latch structures with simpler mechanisms, potentially using magnetic or elastic-based systems instead of multi-component mechanical assemblies. This substitution reduces friction and breakdown risks that could contaminate wafers.
4Ease of manufacture
If the OHT head is lock-fastened with a plurality of lock-fasteners disposed at its center, then the OHT head can be attached to the FOUP, but the concentrated fastening points cause distortion and cracks of the upper side of the FOUP and the OHT head may break loose
Solution Approach 1:
The attachment system is segmented into multiple distributed attachment points rather than concentrated fasteners. The OHT head and FOUP have corresponding features distributed across their surfaces, spreading the mechanical load and preventing localized distortion and cracks.
Solution Approach 2:
The attachment mechanism transitions from a single-plane fastening system to a three-dimensional distributed attachment system. Multiple attachment points are positioned at different locations and orientations, distributing stresses across the FOUP structure and preventing concentration of forces that cause distortion.
Data Source
AI summary
A Front Opening Unified Pod (FOUP) has a pair of latch structures, and the latch structures install in a door of the FOUP. The latch structures use a circular rotary turntable to drive a pair of sliding devices, let the latch structures can lock or unlock more stabilized, and use sliding rollers respectively disposed on the sliding devices to prevent the generation of dusts.