FOUP Opener Door Detection Sensor
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Solution Overview
Problem
Conventional overhead traveling devices for semiconductor wafers cannot detect abnormalities in the lid of a FOUP until transportation begins, which compromises the reliability of preventing wafers from falling during transport.
Innovation Solution
A FOUP opener system with a port plate, port door, and FOUP door detection sensors that use light emitting and receiving means to determine if the FOUP door is correctly fixed and attached to the FOUP main body before unloading, ensuring the lid is securely closed and preventing wafers from falling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the FOUP door detection sensor is installed to detect door attachment before transportation, then the reliability of preventing wafers from falling is improved, but the device complexity increases
Solution Approach 1:
The FOUP door detection sensor detects whether the FOUP door is correctly attached to the FOUP main body before the overhead traveling vehicle begins transportation. This preliminary detection ensures that the door is securely closed prior to movement, preventing wafer falling during transport without requiring complex continuous monitoring systems throughout the transportation process.
Solution Approach 2:
The patent replaces complex mechanical verification methods with an optical detection system. The FOUP door detection sensor uses light emitting and receiving means to detect door attachment status, substituting simpler optical detection for more complex mechanical sensing or manual verification procedures.
2Measurement precision
If the light emitting means and light receiving means are disposed to detect FOUP door attachment status, then the detection precision is improved, but the device complexity increases
Solution Approach 1:
The patent employs optical detection components (light emitting means and light receiving means) to detect FOUP door attachment status, replacing more complex mechanical sensors or manual inspection methods. This optical approach provides precise detection of door positioning while maintaining relatively simple device architecture.
Solution Approach 2:
The light beam serves as an intermediary between the detection system and the FOUP door attachment status. The light emitting means projects a beam that is interrupted or reflected by the FOUP door's position, providing indirect but precise measurement of attachment status without requiring direct mechanical contact or complex sensing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables quick and reliable detection of the FOUP door's correct attachment, preventing issues like falling wafers and ensuring safe transportation by determining the lid's correct fixing position before starting operations.
Implementation Method 1
The FOUP door detection sensor includes light emitting means and light receiving means, and the light emitting means and light receiving means are disposed in positions facing a space formed by the opening window in the port plate such that an optical path along which a light beam emitted by the light emitting means travels to the light receiving means passes through the space of the opening window.
Data Source
AI summary
To ensure that an abnormality in a closed state of a FOUP door serving as a lid of a FOUP can be detected quickly and reliably, a FOUP opener includes a port door attached detachably to an opening window in a port plate for separating the interior and exterior of a semiconductor processing device, and a dock unit for positioning the FOUP in a FOUP door attachment/detachment position. A suction disc mechanism and a lock mechanism for fixing the FOUP door to a FOUP main body and releasing the FOUP door are disposed on the port door. A FOUP door detection sensor for determining whether or not the FOUP door fixed to the FOUP main body, which is positioned in the FOUP door attachment/detachment position on the dock unit, is attached correctly to an opening portion of the FOUP main body is disposed on the port plate.