FOUP Oxygen Control Using Feedback Inert Gas Flow
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Solution Overview
Problem
Current systems fail to ensure that the oxygen content in Front Opening Unified Pods (FOUPs) is consistently below a safety value during temporary storage, leading to potential oxidation of silicon wafers and wasteful use of inert gases, thereby increasing production costs.
Innovation Solution
A system comprising an inflating assembly, a detecting assembly, and a controller that adjusts the flow of inert gases based on detected oxygen levels, ensuring the oxygen content remains below a safety threshold while minimizing gas usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the FOUP is inflated with inert gases with a constant flow, then the production space for the next production procedure is increased, but the oxygen content in the FOUP cannot be guaranteed to be lower than a safety value and inert gases are wasted
Solution Approach 1:
The patent employs a feedback control mechanism where an oxygen sensor continuously monitors the oxygen content inside the FOUP and transmits this information to a controller. The controller dynamically adjusts the flow rate of inert gas from the inflating assembly based on the detected oxygen levels, creating a closed-loop control system that optimizes gas usage while ensuring oxygen content remains below the safety threshold.
Solution Approach 2:
The system transitions from a static constant flow inflation approach to a dynamic variable flow approach. The inflating assembly's gas flow rate is continuously adjusted based on real-time oxygen content detection, allowing the system to adapt to changing conditions inside the FOUP and minimize inert gas consumption while maintaining protective atmosphere.
2Reliability
If the FOUP is inflated with inert gases with a constant flow, then the production space is increased, but the oxidation risk of silicon wafers cannot be eliminated
Solution Approach 1:
The oxygen sensor provides continuous feedback on the oxygen content levels inside the FOUP to the controller. This feedback mechanism ensures that the inert gas inflation process is adjusted in real-time to maintain oxygen content below the safety threshold, thereby protecting silicon wafers from oxidation while optimizing gas usage efficiency.
Solution Approach 2:
The system dynamically changes the flow rate parameter of inert gas based on detected oxygen content levels. When oxygen levels approach the safety threshold, the controller increases the inert gas flow rate to displace oxygen more rapidly, ensuring wafer protection. When oxygen levels are already low, the flow rate is reduced to minimize energy consumption.
3Quantity of substance
If the FOUP is inflated with inert gases for a long-time, then the oxygen content is reduced, but the production cost is increased
Solution Approach 1:
The continuous monitoring feedback from the oxygen sensor allows the system to determine precisely when the oxygen content has reached the desired level. The controller receives this feedback and automatically stops or reduces the inert gas inflation process at the optimal moment, eliminating unnecessary extended inflation time and associated costs while ensuring adequate oxygen reduction.
Solution Approach 2:
Instead of using excessive inert gas inflation time to ensure oxygen reduction, the system applies partial action by monitoring oxygen levels in real-time and stopping the inflation process as soon as the safety threshold is achieved. This prevents over-inflation and reduces both time loss and production costs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents oxidation of silicon wafers and reduces inert gas waste by dynamically adjusting gas flow according to oxygen content, thereby lowering production costs.
Implementation Method 1
The detecting assembly is connected with a gas outlet of the FOUP, and is configured to detect the oxygen content of the gas in the FOUP
Implementation Method 2
the FOUP is usually inflated with inert gases such as nitrogen to lower the oxygen content in the FOUP
Implementation Method 3
the FOUP is inflated with the inert gases with a constant flow
Data Source
AI summary
Embodiments of the disclosure provide a system and method for adjusting an oxygen content in an FOUP. The system for adjusting the oxygen content in the FOUP includes an inflating assembly, the FOUP, a controller and a detecting assembly; the inflating assembly is connected with a gas inlet of the FOUP and configured to input an inert gas to the FOUP; the detecting assembly is connected with a gas outlet of the FOUP and configured to detect the oxygen content of the gas in the FOUP; and the inflating assembly and the detecting assembly are both connected with the controller, and the controller is configured to adjust a flow of the inert gas input from the inflating assembly to the FOUP according to the oxygen content detected by the detecting assembly.