FOUP Purge Flow Control Using Real-Time Humidity Feedback

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing substrate containers, such as FOUPs, face challenges in optimizing purge flow parameters and environmental conditions during semiconductor manufacturing processes, leading to inefficiencies and variations due to differences in EFEM construction and gas flow interference.

Innovation Solution

A system with sensors and controllers within the FOUP measures environmental conditions like relative humidity in real-time, allowing for remote optimization of purge flow parameters, including gas flow rates and port configurations, to achieve optimal environmental responses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If purge flow parameters are optimized remotely based on real-time environmental conditions, then purge efficiency and process stability are improved, but device complexity increases due to additional sensors and control systems

Engineering Contradiction:

Improvepurge efficiencyVSAvoidsystem complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The system continuously monitors environmental conditions (temperature, humidity, pressure) within the FOUP using sensors and uses this feedback to dynamically adjust purge flow parameters. The controller receives real-time data from sensors and modifies gas flow rates accordingly, creating a closed-loop control system that optimizes purge efficiency while maintaining simplicity through automated decision-making algorithms.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The FOUP system performs self-optimization of purge parameters by autonomously monitoring its own environmental conditions and adjusting flow rates without external intervention. The integrated sensors and controller enable the system to self-regulate purge operations based on detected environmental variations, reducing the need for complex external control infrastructure.

Inventive Principle:

Principle #25Self-service

2Reliability

If real-time environmental monitoring is implemented within the FOUP, then process stability and yield are improved, but manufacturing cost increases due to additional components

Engineering Contradiction:

Improveprocess stabilityVSAvoidmanufacturing cost

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The sensor system within the FOUP serves multiple functions: monitoring temperature, humidity, and pressure conditions simultaneously. The same sensor infrastructure supports both purge optimization and general environmental monitoring, maximizing the value of added components while minimizing redundant hardware and associated costs.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Loss of substance

If purge flow rates are dynamically adjusted based on environmental conditions, then gas consumption is minimized, but control complexity increases

Engineering Contradiction:

Improvegas consumptionVSAvoidcontrol complexity

Core Design Contradiction:

Loss of substanceVSDevice complexity

Solution Approach 1:

The system transitions from static, fixed purge flow rates to dynamic, condition-based flow adjustment. The controller continuously adapts purge parameters in response to real-time environmental changes, optimizing gas consumption by delivering precisely the amount of purge gas needed under specific conditions rather than using constant high flow rates.

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables real-time adjustment of purge processes to maintain desired conditions, enhancing purge efficiency, reducing contamination, and minimizing gas consumption, thereby improving yield and process stability.

Implementation Method 1

detecting at least one environmental condition in the interior of the FOUP

Methodology Applied

Scientific EffectHumidity detection: Hygrometer

Implementation Method 2

The sensor may be configured to detect at least one environmental condition in the interior of the FOUP

Methodology Applied

Scientific EffectEnvironmental sensing:

Implementation Method 3

streaming a purge working fluid into an interior of the FOUP; discharging the purge working fluid from the interior of the FOUP

Methodology Applied

Scientific EffectGas flow:

Implementation Method 4

varying purge flow parameters of the purge working fluid for a predetermined period of time

Methodology Applied

Scientific EffectFlow rate control:

Data Source

PatentUS12593647B2Remote optimization of purge flow rates in a container

Publication Date: 2026.03.31 ENTEGRIS INC

AI summary

Optimizing purge flow parameters in a substrate container, includes streaming a purge working fluid into an interior of the substrate container, discharging the purge working fluid from the interior of the substrate container, and varying purge flow parameters of the purge working fluid for a predetermined period of time, detecting at least one environmental condition in the interior of the substrate container during the predetermined period of time, determining optimized purge flow parameters based on the varied purge flow parameters and the at least one detected environmental condition during the predetermined period of time, and adjusting the streaming and the discharging in accordance with the optimized purge flow parameters. The substrate container may include, for example, a front opening unified pod or a reticle pod.