FOUP Storage Shelf Structure Balancing Vibration and Load Capacity
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Solution Overview
Problem
Existing storage shelves for semiconductor wafers face challenges in reducing vibration while maintaining load-carrying capacity, as lower spring constants required for vibration isolation can compromise the support of the objects being isolated.
Innovation Solution
A storage shelf design that incorporates multiple elastic bodies in series, with a higher rigidity elastic body positioned near the lid of the FOUP to counterbalance the center of gravity and prevent tilting, and a configuration that secures the shelf to a rail or supporting member to prevent vibration transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the spring constant of the vibration-isolating member is set lower to reduce vibration, then the vibration-isolating effect is improved, but the load-carrying capacity deteriorates
Solution Approach 1:
The vibration isolation system is divided into multiple elastic bodies (first elastic body between frame and frame unit, second elastic body between shelf plate and frame) arranged in series. This segmentation allows each elastic body to contribute to both vibration isolation and load support, resolving the contradiction between low spring constant for vibration reduction and sufficient load-carrying capacity.
Solution Approach 2:
The patent changes the spring constant parameter by using multiple elastic bodies in series, where the combined spring constant is lower than individual bodies, enabling effective vibration isolation while maintaining load-carrying capacity through the distributed elastic support system.
2Object-affected harmful factors
If multiple elastic bodies are arranged in series to reduce vibration, then the vibration-isolating effect is improved, but the height of the placement unit increases
Solution Approach 1:
The first and second elastic bodies are arranged in a nested configuration where the frame is disposed over beam members with the first elastic body, and the shelf plate is arranged on the frame with the second elastic body. This nesting allows the elastic bodies to be stacked vertically in an space-efficient manner, minimizing the overall height increase while maintaining the series arrangement for vibration isolation.
3Ease of operation
If the FOUP is placed on the shelf plate, then the storage function is achieved, but the FOUP may tilt due to center of gravity shift toward the lid side
Solution Approach 1:
The patent applies different rigidity characteristics to different locations by positioning the first elastic body (with higher rigidity) on the lid side and the second elastic body (with lower rigidity) on the opposite side. This local differentiation of elastic body properties compensates for the FOUP's center of gravity shift, preventing tilting while maintaining storage functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively reduces vibration and maintains load-carrying capacity by setting a lower spring constant for vibration isolation and strategically placing elastic bodies to prevent tilting, while also simplifying the configuration and saving space.
Implementation Method 1
a first elastic body interposed therebetween and a shelf plate that is arranged on the frame with a second elastic body interposed therebetween
Data Source
AI summary
A storage shelf reduces vibration while maintaining load-carrying capacity and includes placement units on which a FOUP is placed, and a frame unit that supports the placement units. The placement units include frames that are arranged on the frame unit with first elastic bodies interposed therebetween, and a shelf plate that is arranged on the frames with second elastic bodies interposed therebetween and is configured to place thereon the FOUP.