Replacement Parts FOUP Mapping With Two-Stage Slot Detection
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Solution Overview
Problem
Conventional mapping routines for electronics processing systems, designed for substrate detection, can cause collisions and damage when applied to containers storing replacement parts, due to the presence of non-uniform objects and improper storage configurations.
Innovation Solution
A method and system utilizing a detection system with an emitting and sensing component at the end effector of a robot arm to identify positions of replacement parts and empty carriers within a storage container, employing specific mapping patterns to differentiate and record the positions of various objects, thereby avoiding collisions and ensuring accurate retrieval.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional mapping routine designed for substrate detection is applied to a container storing replacement parts, then the mapping routine can identify positions of objects, but collisions may occur causing damage to the robot arm, FOUP, and/or objects
Solution Approach 1:
The system performs a preliminary mapping routine before actual retrieval operations to identify the positions and types of objects in the FOUP. This preliminary action allows the system to adapt its subsequent operations to the actual contents, avoiding collisions by knowing in advance where replacement parts are located and what types of objects are present in each slot.
Solution Approach 2:
The mapping routine provides feedback information about the actual contents of the FOUP to the control system. This feedback includes object positions, object types, and slot occupancy status, which the system uses to adjust its retrieval operations and avoid harmful collisions with non-substrate objects.
2Loss of information
If the FOUP contains objects other than substrates, then the mapping routine may identify incorrect positions, but applying the same mapping pattern can cause damage
Solution Approach 1:
The system changes the parameters of the mapping routine based on the detected object types in the FOUP. Instead of applying a single fixed mapping pattern designed for substrates, the system adapts the mapping parameters to account for different object types (replacement parts, carriers, empty slots), thereby identifying correct positions without causing damage.
Solution Approach 2:
The mapping routine is made dynamic by allowing it to adjust its behavior based on the actual contents of the FOUP. The system transitions from a static, substrate-only mapping approach to a dynamic approach that can handle various object types, changing its operation mode according to what is actually present in each slot.
3Productivity
If a robot arm moves according to a fixed mapping pattern, then the operation is simple and fast, but it cannot adapt to containers with non-uniform objects
Solution Approach 1:
The system performs a preliminary mapping routine that quickly scans the FOUP to identify object positions and types before actual retrieval operations. This preliminary action stores the layout information for rapid access during subsequent operations, maintaining high productivity while enabling adaptability to different container contents.
Solution Approach 2:
The system creates a digital copy or map of the FOUP contents based on the mapping routine results. This virtual representation includes object positions, types, and slot occupancy information, which the control system uses to plan and execute retrieval operations efficiently without needing to physically inspect the FOUP each time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the likelihood of end effector and object damage, decreases system latency, and ensures correct retrieval of replacement parts, thereby reducing operational costs and improving efficiency.
Implementation Method 1
The detection system detects an object responsive to a beam directed from the emitting component to the sensing component being broken by the object
Data Source
AI summary
A system includes a factory interface, a load port connected to the factory interface, a container connected to the load port, and a controller connected to a robot arm of the factory interface. The controller determines that the container is configured to store replacement parts for a process chamber of the system and causes the robot arm to move according to a first mapping pattern to identify, using a detection system at a distal end of an end effector of the robot arm, positions in the container. Regions of the container that do not contain replacement parts are determined and the robot arm is moved according to a second mapping pattern to identify a position in the container of a wafer and/or an empty carrier for a replacement part. A mapping of positions of replacement parts and positions of the wafer and/or empty carrier is recorded in a storage medium.