FOUP Substrate Transport Interference Prevention
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Solution Overview
Problem
Conventional substrate treating apparatuses risk damaging substrates due to potential interference between support arms and substrates during transport, as the support arms may not always be positioned correctly for safe transfer within the limited space of a FOUP.
Innovation Solution
A substrate treating apparatus that includes a transport device with support members, a substrate detecting device to identify substrate positions, and a support member detecting device to check the alignment of support members, all controlled by a device that determines whether to proceed with transport based on detection results to avoid interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the transport mechanism moves to the transfer position adjacent the FOUP access opening, then the substrates can be transported between the FOUP and treating section, but the support arms may not be in positions fit for receiving the substrates, causing potential damage to substrates
Solution Approach 1:
The support arms are positioned in advance to predetermined positions corresponding to substrate storage positions before the transport mechanism reaches the transfer position. This preliminary positioning ensures that when substrates are transferred, the support arms are already correctly aligned, preventing damage while enabling efficient transport.
Solution Approach 2:
A detection device detects the actual positions of substrates in the FOUP and provides feedback to the control device. The control device then adjusts the support arm positions based on this feedback to ensure precise alignment with the substrates, preventing misalignment damage while maintaining transport capability.
2Reliability
If the support arms are positioned to avoid interfering with substrates, then substrate damage is prevented, but it cannot be ensured that the support arms will be in correct positions for receiving substrates when needed
Solution Approach 1:
The support arms are pre-positioned to predetermined positions that correspond to substrate storage positions before transport operations begin. This ensures both substrate safety and transport efficiency by having support arms ready at correct positions without requiring real-time adjustment during critical transfer moments.
Solution Approach 2:
The support arm positioning system is made dynamic and adjustable based on detected substrate positions. The control device can adjust support arm positions in real-time based on feedback from detection devices, ensuring both substrate safety and efficient transport by adapting to actual substrate locations.
3Loss of information
If mapping arms detect substrate positions and numbers, then substrate inventory is known, but the support arms of the transport mechanism are not necessarily in positions fit for receiving the substrates
Solution Approach 1:
The detection device that identifies substrate positions and numbers provides feedback to the control device. The control device uses this information to precisely position the support arms at predetermined locations corresponding to detected substrate positions, ensuring both accurate substrate identification and precise support arm alignment for safe transport.
Data Source
AI summary
A substrate treating apparatus includes a treating section, a table for receiving a FOUP (Front Opening Unified Pod) storing the substrates, and an attaching and detaching unit for a lid to/from an access opening of the FOUP placed on the table. A transport unit is movable to a transfer position opposed to the access opening of the FOUP, and has support members for supporting the substrates, the transport unit transporting the substrates held by the support members between the treating section and the FOUP. A substrate detecting unit detects the substrates stored in the FOUP with the lid detached, a support member detecting unit detects the support members of the transport unit, and a control unit determines whether to transport the substrates, with the lid detached and the transport unit moved to the transfer position, based on detection of the substrates, and detection of the support members.