FOUP Transfer Interface Using Optical I/O Near Existing Load Ports

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing solutions for FOUP transfer in semiconductor manufacturing factories require significant modifications to existing equipment and software, leading to prolonged installation times and increased production costs.

Innovation Solution

A FOUP transfer device that can be installed near existing load ports with minimal modifications, utilizing optical I/O communication devices to communicate between the load port, OHT cart, and host computer, allowing for efficient FOUP transfer without disrupting ongoing production.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of time

If a temporary storage device is installed in the vicinity of the EFEM to store multiple FOUPs, then the non-operating time of processing devices is reduced, but the processing devices must be stopped for a long time during installation, reducing semiconductor manufacturing productivity

Engineering Contradiction:

Improvenon-operating time of processing devicesVSAvoidsemiconductor manufacturing productivity

Core Design Contradiction:

Loss of timeVSProductivity

Solution Approach 1:

The system is segmented into multiple independent FOUP transfer devices, each capable of operating autonomously. This allows the transfer function to be divided into separate units that can be installed and operated independently, minimizing disruption to existing processing devices and maintaining manufacturing productivity during implementation.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The FOUP transfer device acts as an intermediary between the OHT conveyance cart and the load port. It receives FOUPs from the OHT cart and transfers them to the load port, enabling continuous operation without requiring the processing devices to stop for installation of complex storage systems.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Loss of time

If a temporary storage device is installed to store and transport multiple FOUPs, then the non-operating time is shortened, but the device becomes relatively large and expensive, increasing production cost

Engineering Contradiction:

Improvenon-operating timeVSAvoidsize and cost of storage device

Core Design Contradiction:

Loss of timeVSDevice complexity

Solution Approach 1:

The invention extracts the essential transfer function from complex storage systems. Instead of installing large temporary storage devices, it uses a simplified transfer mechanism that only performs the necessary FOUP exchange between OHT cart and load port, significantly reducing device size and cost while maintaining operational efficiency.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The FOUP transfer device uses a simple, cost-effective design with basic components such as a mounting table, holding portion, arm portion, and elevating mechanism. This disposable-like simplicity allows for rapid installation and removal without significant investment in complex infrastructure.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

3Ease of operation

If communication is performed directly between the load port and OHT cart, then the system requires significant modifications to existing equipment and software, leading to prolonged installation times

Engineering Contradiction:

Improvecommunication efficiencyVSAvoidinstallation time

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

The FOUP transfer device serves as a communication intermediary, receiving instructions from the host computer and relaying them to the OHT cart. This intermediary role allows the system to maintain existing communication protocols between the load port and OHT cart while adding new functionality, thereby avoiding prolonged installation times associated with modifying existing communication infrastructure.

Inventive Principle:

Principle #24Intermediary (Mediator)

4Ease of manufacture

If the FOUP transfer device is installed near existing load ports, then minimal modifications are required to existing equipment, but the device must efficiently coordinate with existing communication systems

Engineering Contradiction:

Improveinstallation easeVSAvoidcommunication coordination complexity

Core Design Contradiction:

Ease of manufactureVSDevice complexity

Solution Approach 1:

The FOUP transfer device is designed with universal communication capabilities that allow it to interface with existing load port and OHT cart systems. By incorporating multiple communication interfaces and protocols, the device can coordinate with various existing systems without requiring complex custom integration, thereby easing installation while managing communication complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS12327746B2FOUP transfer device

Publication Date: 2025.06.10 RORZE CORP

AI summary

Provided is a FOUP transfer device for transferring FOUPs between load ports and which is capable of reducing remodeling work on a pre-installed conveyance device as much as possible. FOUP transfer devices 1-1, 1-2 are installed in the vicinity of the load ports of the conveyance device, comprising one or more load ports 18-1, 18-2, and transfer FOUPs 3 between the load ports 18-1, 18-2. The FOUP transfer devices 1-1, 1-2 have first optical I/O communication devices 31-3, 31-4 and are configured such that second optical I/O communication devices 31-1, 31-2 provided for the load ports 18-1, 18-2 are connected thereto, and so as to carry out, in place of the load ports 18-1, 18-2, the optical I/O communication carried out between the load ports 18-1, 18-2 and an OHT cart 11.