FOUP Transfer Ventilation Layout for Lower Nitrogen Purge Use
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Solution Overview
Problem
Conventional substrate transferring apparatuses require excessive nitrogen gas for ventilation and extended shutdown times due to unnecessary ventilation in areas that do not require it.
Innovation Solution
The apparatus excludes the driving equipment room from the ventilation space, reducing the amount of nitrogen gas required and shutdown time, while also incorporating a sub fan and optimized valve systems to enhance gas flow and particle management.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the driving equipment room is included in the ventilation space, then the ventilation coverage is improved, but the nitrogen gas consumption increases
Solution Approach 1:
The ventilation space is segmented into two distinct zones: the FOUP receiving room (first space) that requires nitrogen gas ventilation, and the driving equipment room (second space) that does not require ventilation. This segmentation allows selective ventilation only where needed, reducing overall nitrogen gas consumption while maintaining necessary ventilation coverage.
Solution Approach 2:
The driving equipment room is extracted from the ventilation space. By removing the second space (driving equipment room) from the ventilation area, the system eliminates unnecessary nitrogen gas consumption in areas where ventilation is not required, while preserving ventilation functionality in the FOUP receiving room.
2Reliability
If the driving equipment room is included in the ventilation space, then the ventilation coverage is improved, but the shutdown time increases
Solution Approach 1:
The ventilation system is segmented to operate independently in the FOUP receiving room without involving the driving equipment room. This allows the ventilation to be stopped or adjusted without affecting equipment operation, significantly reducing shutdown time while maintaining necessary ventilation coverage.
Solution Approach 2:
The driving equipment room is extracted from the ventilation space, allowing the ventilation system to be decoupled from equipment operation. This enables faster shutdown of ventilation without requiring equipment shutdown, reducing loss of time.
3Use of energy by stationary object
If the main fan rotational speed is reduced, then the power consumption is lowered, but the gas flow efficiency may be affected
Solution Approach 1:
The ventilation system is segmented to operate only in the FOUP receiving room, which reduces the total volume requiring gas flow. This allows the main fan to operate at lower rotational speed while maintaining adequate gas flow efficiency for the reduced ventilation area, thereby lowering power consumption without significantly compromising productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces nitrogen gas consumption and equipment shutdown time, lowers power consumption by reducing main fan rotational speed, and improves gas flow efficiency within the apparatus.
Implementation Method 1
a main fan 140 is provided to blow nitrogen gas (or air) downward
Implementation Method 2
it is possible to induce a smooth flow of nitrogen gas by reducing turbulence in the FOUP receiving room
Data Source
AI summary
A substrate transferring apparatus capable of reducing a nitrogen gas for purging and a shutdown time thereof. The Substrate transferring apparatus includes a ventilation driving room, a FOUP receiving room, a driving equipment room and a ventilation duct. The ventilation driving room is equipped with a main fan for blowing air downward. The FOUP receiving room is disposed under the ventilation driving room and accommodates a FOUP for storing a substrate. The driving equipment room is disposed under the FOUP receiving room. The ventilation duct connects the FOUP receiving room and the ventilation driving room.