Four-Element Electrostatic Objective Lens for Multi-Energy Beam Focusing
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Solution Overview
Problem
Charged particle columns are typically optimized for a specific beam energy, limiting their performance at other energy levels, which can result in reduced imaging or processing quality when multiple energies are required.
Innovation Solution
A four-element electrostatic objective lens with multiple operating modes allows for rapid configuration of focusing conditions, enabling improved performance at both lower and higher beam energies by adjusting the voltages applied to its electrodes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the column is optimized for a specific beam energy, then the imaging or processing performance is improved at that energy, but the performance deteriorates at other beam energies
Solution Approach 1:
The patent applies the dynamics principle by making the electrostatic objective lens adjustable through voltage control. The lens can be dynamically reconfigured by changing the voltage applied to its electrodes, allowing it to adapt its focal length and focusing characteristics to match different beam energies. This enables the column to maintain optimal beam focusing performance across a wide range of energies rather than being fixed for a single energy level
Solution Approach 2:
The patent implements parameter changes by varying the voltage applied to the electrostatic objective lens electrodes. By changing this electrical parameter, the lens's focal length and focusing properties are adjusted to match the specific beam energy being used. This allows the system to optimize beam focusing for each energy level, resolving the contradiction between specialized optimization and broad adaptability
2Adaptability or versatility
If a four-element electrostatic objective lens is used with multiple operating modes, then adaptability across different beam energies is improved, but device complexity increases
Solution Approach 1:
The patent applies the universality principle by designing a four-element electrostatic objective lens that can perform multiple functions across different operating modes. Each electrode can be independently voltage-controlled to create different lens configurations, allowing a single lens structure to replace what would traditionally require multiple specialized lenses for different energy ranges. This multi-functionality achieves broad energy adaptability without proportionally increasing overall system complexity
Solution Approach 2:
The patent implements segmentation by dividing the objective lens into four separate electrodes rather than using a single fixed lens element. This segmentation allows independent control of each electrode's voltage, enabling flexible configuration of the electric field distribution. The segmented structure provides the adaptability needed for multiple beam energies while keeping each individual electrode relatively simple in design
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration maintains smaller beam diameters for pre-determined beam currents and focuses larger beam currents into pre-determined beam diameters across a wider range of energies, enhancing imaging and processing capabilities.
Implementation Method 1
a four-element electrostatic objective lens provides multiple operating modes
Implementation Method 2
By changing the voltages applied to the four electrodes of the electrostatic objective lens, different focusing conditions may be rapidly configured
Data Source
AI summary
A charged particle column having improved performance at multiple beam energies. The column employs a four-element objective lens to enable improved beam focusing performance at both high and low beam energies at a target, with differing focus voltage configurations for different beam energies. By changing the voltages applied to the four electrodes of the objective lens, different focusing conditions may be rapidly configured, enabling rapid toggling between optimized imaging and optimized processing of a target.