Fourier-Based Image Resolution Characterization for IC Inspection
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Solution Overview
Problem
Existing inspection and metrology systems lack sensitivity to image resolution, particularly for sharp images with clearly defined borders, limiting their ability to accurately characterize the resolution of extremely small integrated circuit components.
Innovation Solution
The system employs key performance indicators that are sensitive to image resolution by observing pixel size, applying a Fourier transform to convert raw images, and determining a resolution indicator based on the transformed image, enhancing the robustness and reliability of image resolution characterization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an optical microscope is used for inspection, then the inspection system can operate with light wavelength resolution, but the resolution is limited to a few hundred nanometers and cannot inspect sub-100 nanometer IC components
Solution Approach 1:
The patent changes the fundamental parameter of the inspection system by transitioning from optical microscopy (light wavelength limited) to electron beam microscopy (electron wavelength limited). This parameter change enables resolution improvement from a few hundred nanometers to sub-100 nanometer scale, directly resolving the contradiction between maintaining optical operation simplicity and achieving higher resolution for small IC components
2Measurement precision
If a charged particle beam microscope is used to achieve sub-100 nanometer resolution, then the measurement precision improves, but the system complexity increases compared to optical microscopes
Solution Approach 1:
The patent replaces the optical mechanical system with an electron beam-based system. By substituting light with electron beams and using electromagnetic fields for beam control instead of optical lenses, the system achieves higher resolution while managing the inherent complexity through fundamental physics-based substitution rather than mechanical refinement
3Ease of operation
If traditional inspection methods are used, then the system operation is simple, but the sensitivity to image resolution is insufficient for sharp images with clearly defined borders
Solution Approach 1:
The patent introduces key performance indicators (KPIs) as intermediary metrics that bridge the gap between simple image acquisition and precise resolution measurement. These KPIs serve as mediators that automatically quantify resolution characteristics of sharp images with clearly defined borders, maintaining operational simplicity while dramatically improving resolution sensitivity through computational analysis of the transformed image data
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for more accurate and reliable determination of image resolution, improving the detection of defects in small IC components and optimizing the manufacturing process by adjusting image resolution as needed.
Implementation Method 1
converting the raw image into a transformed image by applying a Fourier transform to the raw image
Data Source
AI summary
Systems, apparatuses, and methods include a providing a raw image of a sample; observing a pixel size of the raw image; converting the raw image into a transformed image by applying a Fourier transform to the raw image; applying a function, based on the pixel size, to the transformed image; and determining a key performance indicator of a resolution of the raw image based on results of the applied function.