Laser Spectrum Measurement via FP Etalon and Grating
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing devices for measuring the spectrum of laser devices in semiconductor chip processing face challenges such as complex optical path structures, large volumes, high costs, extensive calculations, and poor operational stability, which hinder precise measurements of central wavelength, FWHM, and E95.
Innovation Solution
A device comprising a first optical path assembly for homogenizing the laser beam and a second optical path assembly that includes an FP etalon and a grating arranged in series, allowing for dispersion imaging without beam splitting, thereby simplifying the optical path and measurement algorithm.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If beam splitting is used to measure spectral parameters, then measurement precision can be improved, but device complexity and optical path structure become more complex
Solution Approach 1:
The patent merges the functions of beam splitting, spectral measurement, and homogenization into a single integrated optical path. The FP etalon and grating are arranged in series within one optical path, eliminating the need for separate beam splitting paths while maintaining measurement precision for spectral parameters.
Solution Approach 2:
The single optical path assembly performs multiple functions simultaneously: it homogenizes the laser beam, disperses the spectrum through the grating, and enables spectral parameter measurement through the FP etalon. This multi-functional design reduces device complexity while maintaining measurement capabilities.
2Measurement precision
If complex optical path structures are used to achieve high measurement precision, then spectral parameters can be measured accurately, but device volume increases
Solution Approach 1:
The patent nests the FP etalon and grating within a compact single optical path structure. The optical components are arranged in series in a nested configuration, achieving high measurement precision while minimizing device volume compared to traditional beam-splitting architectures.
3Measurement precision
If traditional measurement devices are used, then spectral parameters can be measured, but operational stability is poor due to moving elements
Solution Approach 1:
The patent replaces mechanical beam splitting systems with a purely optical single-path design. By using the FP etalon and grating in series within one optical path, the design eliminates moving elements and mechanical adjustments, significantly improving operational stability while maintaining measurement precision.
4Measurement precision
If beam splitting and complex optical paths are used, then spectral parameters can be measured, but the device becomes expensive
Solution Approach 1:
The patent combines multiple measurement functions into a single optical path, reducing the number of optical components and assemblies required. This merging approach simplifies manufacturing processes and reduces overall device cost while maintaining the precision needed for measuring central wavelength, FWHM, and E95.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables high-precision measurements of central wavelength, FWHM, and E95 with a simple and compact structure, achieving sub-picometer-level precision without the need for moving elements, thus improving stability and reducing costs.
Implementation Method 1
The homogenized laser beam passes through the FP etalon to generate an interference fringe
Implementation Method 2
The grating is arranged after the FP etalon, or is arranged before the FP etalon in the measurement optical path, and configured to disperse the laser beam passing through the FP etalon
Data Source
AI summary
Provided are a device (4) and a method for online measuring a spectrum for a laser device. The device (4) for online measuring a spectrum for a laser device includes: a first optical path assembly (G1) and a second optical path assembly (G2), and the second optical path assembly (G2) and the first optical path assembly (G1) constitute a measurement optical path. The second optical path assembly (G2) includes: an FP etalon (15) and a grating (18). The homogenized laser beam passes through the FP etalon (15) to generate an interference fringe. The grating (18) is arranged after the FP etalon (15), or is arranged before the FP etalon (15) in the measurement optical path, and is configured to disperse the laser beam passing through the FP etalon (15).