Fabry-Perot Cavity Phase Modulator with Tunable Semiconductor Core

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Solution Overview

Problem

Existing optical modulating devices have slower response times and lower optical efficiency due to their driving methods, limiting their applications in high-speed light modulation.

Innovation Solution

An optical modulating device with a Fabry-Perot cavity structure, featuring a tunable core made of semiconductor material that modulates light phase by electrical control of refractive index, integrated with distributed Bragg reflectors and a common electrode, enabling faster and more efficient light modulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional optical modulating devices (liquid crystals, MEMS) are used, then the device structure is simple and easy to manufacture, but the response time is slow (several μs or more)

Engineering Contradiction:
Improveresponse timeVSAvoiddevice structure
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent replaces mechanical movement of light blocking/reflecting elements (MEMS) and liquid crystal molecular reorientation with direct electro-optic modulation in a semiconductor Fabry-Perot cavity. The electro-optic effect allows direct electrical control of refractive index without mechanical motion, achieving response times in the nanosecond range rather than microseconds.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operating parameters by using electro-optic materials with high refractive index modulation capability in a Fabry-Perot cavity configuration. The cavity enhances the light-matter interaction, allowing small changes in refractive index to produce large phase modulation depths, thereby achieving fast response with lower driving voltages.

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If conventional optical modulating devices are used, then the device structure is simple, but the optical efficiency is low

Engineering Contradiction:
Improveoptical efficiencyVSAvoiddevice structure
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent employs composite structures combining electro-optic semiconductor materials with high refractive index contrast in a Fabry-Perot cavity configuration. This composite design enhances optical confinement and interaction, improving modulation efficiency and reducing energy losses compared to conventional single-material approaches.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent transitions from planar modulation to three-dimensional cavity-based modulation, utilizing the vertical dimension of the Fabry-Perot cavity to enhance light-matter interaction. The cavity resonances provide multiple passes of light through the electro-optic material, effectively increasing the interaction length and improving optical efficiency without increasing device footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Volume of moving object

If meta structure is applied to optical modulating devices, then the device size is reduced, but the manufacturing complexity increases

Engineering Contradiction:
Improvedevice sizeVSAvoidmanufacturing complexity
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

The patent employs dynamically tunable resonant frequencies of the Fabry-Perot cavity to achieve wavelength-selective modulation. The cavity can be electrically tuned to resonate at different wavelengths, providing dynamic adaptability without requiring complex static meta-structure patterns for each wavelength, thereby simplifying manufacturing while maintaining compact size.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves higher speed and optical efficiency in light modulation, suitable for applications like laser beam steering, LIDARs, and spatial light modulators, with the ability to modulate light phase by 0 to 360 degrees.

Implementation Method 1

phase modulator formed on the substrate and including a Fabry-Perot cavity, wherein the Fabry-Perot cavity of the phase modulator includes a first reflective layer, a second reflective layer, and a tunable core formed between the first reflective layer and the second reflective layer, wherein the tunable core is formed of a semiconductor material and is configured to modulate a phase of light based on modulation of a refractive index of the tunable core by electrical control of the tunable core

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Implementation Method 2

phase modulator formed on the substrate and including a Fabry-Perot cavity, wherein the Fabry-Perot cavity of the phase modulator includes a first reflective layer, a second reflective layer, and a tunable core formed between the first reflective layer and the second reflective layer

Methodology Applied
Scientific EffectFabry-Perot cavity resonance: Fabry-Perot Interferometer

Implementation Method 3

at least one from among the first reflective layer and the second reflective layer include a distributed Bragg reflector

Methodology Applied
Scientific EffectBragg reflection: Bragg Diffraction

Data Source

PatentUS11513219B2Fabry-Perot cavity phase modulator including a tunable core between reflective layers, an optical modulating device including the same, and a LIDAR apparatus including the optical modulating device
Publication Date: 2022.11.29 SAMSUNG ELECTRONICS CO LTD
  • US11513219B2 patent drawing
  • US11513219B2 patent drawing
  • US11513219B2 patent drawing

AI summary

Provided are an optical modulating device and a system including the optical modulating device. The optical modulating device includes a substrate, and a phase modulator formed on the substrate and including a Fabry-Perot cavity. The Fabry-Perot cavity of the phase modulator includes a first reflective layer, a second reflective layer, and a tunable core formed between the first reflective layer and the second reflective layer, wherein the tunable core is formed of a semiconductor material and is configured to modulate a phase of light corresponding to modulation of a refractive index of the tunable core according to electrical control.