Fracture Holding Structure for Gravity-Separated Substrate Parts

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing methods for separating substrates in the Smart Cut process face challenges in maintaining the distance between the separated parts, leading to potential damage or contamination due to friction and contact during handling.

Innovation Solution

A device with lugs arranged on columns that hold the assembly in a horizontal position, allowing separation by gravity without external manipulation, and includes a support for the lower part to be gripped by its rear face, minimizing contact and using an ultrasonic device to initiate the fracture wave for precise separation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If assemblies are arranged vertically in the furnace, then the fracture plane is vertical and separation is achieved, but the two parts remain very close or pressed against each other causing friction and surface deterioration

Engineering Contradiction:
Improvesurface condition qualityVSAvoidfriction and contact damage
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent changes the symmetric vertical arrangement to an asymmetric horizontal arrangement where the assembly is positioned horizontally on the support, creating a configuration where the two parts separate in opposite directions (one falling, one remaining) rather than staying pressed together

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

Instead of the conventional vertical arrangement where gravity acts perpendicular to the fracture plane, the patent inverts the arrangement to horizontal positioning where gravity acts parallel to the fracture plane, causing one part to fall away from the other after separation

Inventive Principle:
Principle #13The other way round (Inversion)

2Ease of operation

If assemblies are arranged horizontally, then handling is simplified, but sliding during fracture and gripping generates scratches on facing faces due to friction and contact

Engineering Contradiction:
Improvehandling easeVSAvoidsurface condition quality
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The patent introduces a support as an intermediary element that receives the assembly in a horizontal position and provides a controlled separation mechanism, mediating between the handling requirements and the surface protection needs by allowing gravity-driven separation without manual manipulation

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system uses gravity as a self-service force to automatically separate the two parts after fracture initiation, eliminating the need for external manipulation or gripping that would cause surface damage, with the lower part naturally falling away from the upper part

Inventive Principle:
Principle #25Self-service

3Stability of the object's composition

If the assembly rests on a rigid support, then stability is maintained, but the smaller distance between substrates after separation increases the probability of contact and damage

Engineering Contradiction:
Improveassembly stabilityVSAvoidseparation reliability
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The patent uses gravity as a counteracting force that actively promotes separation by causing the lower part to fall away from the upper part, counterbalancing any tendency for the parts to remain in contact or for the assembly to collapse onto itself

Inventive Principle:
Principle #8Anti-weight (Counterweight)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Ensures minimal intervention and reduces the risk of damage or contamination by maintaining the substrates at a distance, promoting surface homogeneity and controlled separation without direct contact between the parts.

Implementation Method 1

using an ultrasonic device to initiate the fracture wave for precise separation

Methodology Applied
Scientific EffectUltrasonic vibration: Ultrasonic Vibration

Implementation Method 2

separation by gravity without external manipulation

Methodology Applied
Scientific EffectGravity: Gravitation

Data Source

PatentEP3939073B1Holding device for an assembly that is to be fractured
Publication Date: 2023.10.11 SOITEC SA
  • EP3939073B1 patent drawingFigure 1~3A
  • EP3939073B1 patent drawingFigure 3B~3C

AI summary

Holding device (100) for an assembly (1) that is to be fractured, designed to separate along a fracture plane defined between an upper part (7) and a lower part (8) of the assembly (1) that is to be fractured, the holding device (100) comprising at least two lugs (9) that are configured to hold the assembly (1) that is to be fractured in suspension in a substantially horizontal holding position, the lugs (9) being intended to be located between the upper part (7) and the lower part (8), against a peripheral chamfer (10) of the upper part; a support (15), located below and remote from the lugs (9), so as to receive the lower part (8) by gravity when the assembly (1) that is to be fractured is separated, and to hold the lower part at a distance from the upper part (7) which is held by the lugs (9).