Frame Unit Transfer System Using Segmented Tray Handling

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Solution Overview

Problem

The existing frame unit transfer systems in semiconductor processing face inefficiencies as they require waiting for all frame units in a cassette to be processed before moving to the next step, leading to increased operator load and production delays.

Innovation Solution

A frame unit transfer system utilizing a tray with a conveyor and tray support member, allowing for individual frame unit transfer without increasing operator load, by using a tray with a mounting surface, side walls, and abutting members to prevent frame units from projecting during transfer, and a tray transfer mechanism to move trays between conveyor and support members.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If frame units are transferred on a cassette-by-cassette basis, then the transfer process is simpler to manage, but production efficiency decreases due to waiting for all frame units to be processed

Engineering Contradiction:
Improvetransfer process managementVSAvoidproduction efficiency
Core Design Contradiction:
Ease of operationVSProductivity

Solution Approach 1:

The invention divides the cassette into multiple trays, each tray holding a subset of frame units. This segmentation allows individual trays to be transferred independently to different process steps, enabling parallel processing of frame units that would otherwise wait in batches. The tray-level granularity resolves the contradiction by maintaining simple cassette management while achieving efficient individual frame unit transfer.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention introduces a new dimension of organization by stacking multiple trays vertically within a cassette structure. This vertical arrangement allows multiple trays to be handled as a single cassette unit for loading/unloading, while enabling selective extraction and transfer of individual trays. This dimensional approach reconciles batch management simplicity with individual unit processing efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If frame units are manually transferred one-by-one, then production efficiency improves by eliminating waiting time, but operator load increases requiring more operators

Engineering Contradiction:
Improveproduction efficiencyVSAvoidoperator load
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The tray acts as an intermediary carrier between the cassette and processing equipment. By introducing this intermediate layer, the system enables automated or semi-automated tray transfer mechanisms to handle frame units individually without requiring operators to manually handle each frame unit. The tray mediates between bulk cassette handling and individual frame processing, reducing operator burden while maintaining high productivity.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If all frame units in a cassette are processed before transfer, then transfer operations are simpler, but waiting time increases reducing production efficiency

Engineering Contradiction:
Improvetransfer operation simplicityVSAvoidwaiting time
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The invention enables preliminary transfer of trays containing frame units that have completed processing, while other trays remain in the cassette for continued processing. This preliminary action allows the system to proactively move finished units to the next stage without waiting for the entire cassette to be processed, thereby reducing waiting time while maintaining manageable transfer operations through tray-level control.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS10037907B1Frame unit transfer system
Publication Date: 2018.07.31 DISCO CORP
  • US10037907B1 patent drawing
  • US10037907B1 patent drawing
  • US10037907B1 patent drawing

AI summary

Disclosed herein is a frame unit transfer system for transferring a frame unit formed by supporting a workpiece through an adhesive tape to an annular frame, the frame unit being stored in a tray during transfer. The tray includes a bottom portion having a mounting surface for mounting the frame unit thereon during transfer, a side wall standing from the outer edge of the bottom portion, an inlet/outlet opening formed through the side wall so as to allow the pass of the frame unit, an abutting member provided on the bottom portion at the inlet/outlet opening for preventing the frame unit mounted on the mounting surface of the bottom portion from undesirably projecting from the inlet/outlet opening during transfer, and a plurality of openings formed at predetermined target positions in the bottom portion in relation to the frame unit.