Framed Semiconductor Coating for Uniform Nanomaterial Thin Films

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Solution Overview

Problem

Existing semiconductor-based apparatuses face challenges in achieving high precision and uniformity in layer arrangements, particularly in the deposition of nanomaterial thin films, which often result in non-uniform coatings and issues like 'coffee rings' due to inadequate control over the spreading and drying of inks.

Innovation Solution

A frame structure is introduced around the functional semiconductor-based substrate, which delimits and precisely positions a coating, allowing for high-viscosity inks to be used and ensuring uniform coverage by controlling the spreading and drying of nanomaterial thin films, thereby preventing material aggregation at the periphery.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional deposition methods are used for nanomaterial thin films, then the coating process can be performed, but the coating uniformity deteriorates due to material aggregation at periphery and coffee ring effects

Engineering Contradiction:
Improvecoating uniformityVSAvoidmaterial aggregation and coffee ring effects
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

A frame structure is introduced as an intermediary element between the substrate and the coating material. This frame structure serves as a mediator that guides the flow and distribution of high-viscosity ink, preventing direct uncontrolled spreading on the substrate surface and thereby eliminating coffee ring effects and peripheral material aggregation

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the viscosity parameter of the coating material by using high-viscosity inks instead of conventional low-viscosity materials. This parameter change, when combined with the frame structure, allows for controlled deposition that prevents material aggregation while maintaining coating uniformity

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If high-viscosity inks are used for nanomaterial deposition, then coating uniformity can be improved, but the ink spreading control becomes more difficult without a frame structure

Engineering Contradiction:
Improvecoating uniformityVSAvoidink spreading control
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The frame structure acts as an intermediary that simplifies the manufacturing process by providing physical boundaries that automatically control ink spreading. This mediator eliminates the need for complex process control mechanisms, making the use of high-viscosity inks straightforward and easy to manufacture

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The frame structure is pre-positioned on the substrate before ink deposition. This preliminary action creates predetermined boundaries that guide the ink flow during deposition, making the subsequent coating process easier to control and manufacture without requiring real-time adjustment mechanisms

Inventive Principle:
Principle #10Preliminary action

3Ease of manufacture

If the coating area is left un delimited, then the application process is simpler, but the coating precision and material distribution uniformity deteriorate

Engineering Contradiction:
Improveapplication process simplicityVSAvoidcoating precision and material distribution
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The coating area is segmented into a defined region by the frame structure, which divides the substrate surface into a controlled coating zone and an uncoated zone. This segmentation provides simple application process boundaries while ensuring precise coating placement and uniform material distribution within the framed area

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The frame structure adds a spatial dimension boundary to the coating process. By introducing vertical sidewalls that extend upward from the substrate, the frame creates a three-dimensional confined space that guides material deposition, thereby achieving precise coating control without complicating the application process

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS11908763B2Apparatus having a functional structure delimited by a frame structure and method for producing same
Publication Date: 2024.02.20 INFINEON TECHNOLOGIES AG
  • US11908763B2 patent drawing
  • US11908763B2 patent drawing
  • US11908763B2 patent drawing

AI summary

An apparatus includes a semiconductor-based substrate with a functional structure that is formed in or on the semiconductor-based substrate. The apparatus includes a frame structure surrounding the functional structure and includes a coating that covers the functional structure and is delimited by the frame structure.