Frequency Analysis Apparatus for Semiconductor Testing
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Solution Overview
Problem
Existing frequency analysis technologies face challenges in measuring detection signals at high band frequencies with sufficient precision and accuracy.
Innovation Solution
A frequency analysis apparatus and method that generates a reference signal with harmonics synchronized with an operational pulse signal, allowing for the acquisition of phase and amplitude differences between the detection signal and reference signal at high band frequencies using spectrum analyzers, enabling precise measurement of detection signals across multiple bands.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional frequency analysis methods are used, then measurement can be performed at low frequencies, but measurement precision deteriorates at high band frequencies
Solution Approach 1:
The patent applies dynamics by making the detection frequency variable and adaptable. The system dynamically adjusts the detection frequency to match the operational pulse signal frequency, allowing precise measurement across different frequency bands. The reference signal generator and detector work together to track and measure signals at varying high frequencies, transforming a static measurement system into a dynamic one that adapts to different operating conditions.
Solution Approach 2:
The patent utilizes parameter changes by varying the detection frequency parameter to match the operational pulse signal frequency. By changing the detection frequency parameter dynamically, the system maintains measurement precision across different frequency bands. The reference signal frequency is also changed to synchronize with the operational pulse signal, enabling accurate phase and amplitude measurements at high frequencies.
2Adaptability or versatility
If high band frequency measurement is attempted with traditional methods, then frequency band coverage is improved, but measurement precision deteriorates due to noise
Solution Approach 1:
The patent introduces a reference signal as an intermediary to facilitate accurate measurement at high frequencies. The reference signal, generated in synchronization with the operational pulse signal, serves as a mediator that enables the detector to accurately measure phase and amplitude even in the presence of noise. This intermediary signal provides a stable reference against which the detection signal can be compared, improving measurement precision across all frequency bands.
Solution Approach 2:
The system implements feedback by using the detected phase and amplitude information to reconstruct the time waveform of the detection signal. The analysis unit processes the detected parameters and generates feedback information about the signal characteristics, which can be used to verify measurement accuracy and adjust measurement parameters if needed. This feedback mechanism ensures maintained precision even when measuring at extended frequency bands.
3Device complexity
If conventional measurement devices are used for high frequency, then equipment simplicity is maintained, but signal-to-noise ratio deteriorates
Solution Approach 1:
The patent applies universality by designing a measurement system that can handle multiple frequency bands and signal types using the same core architecture. The detector and analysis unit are designed to work across a wide frequency range, eliminating the need for different specialized equipment for different frequency bands. This multi-functional approach maintains device simplicity while achieving high signal-to-noise ratio through synchronized detection and reference signaling.
Solution Approach 2:
The patent replaces traditional mechanical or analog measurement approaches with an electronic synchronization-based system. Instead of relying on physical signal conditioning circuits that become noisy at high frequencies, the system uses electronic generation of reference signals and digital processing of phase and amplitude information. This substitution of measurement methodology maintains simplicity while dramatically improving signal-to-noise ratio at high frequencies.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables reliable and high-precision measurement of detection signals at high band frequencies, reducing noise and improving signal-to-noise ratio, while being cost-effective compared to traditional methods like oscilloscopes.
Implementation Method 1
an operational pulse signal generator configured to generate an operational pulse signal to be input to the measurement target
Implementation Method 2
an optical system configured to irradiate the measurement target with the light, and guide reflected light of the light, wherein the detector may be an optical sensor configured to output the detection signal by detecting the reflected light
Implementation Method 3
a reference signal generator configured to generate a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal
Implementation Method 4
a first electronic device configured to receive the detection signal output by the detection unit and acquire a phase and amplitude of the detection signal at a detection frequency
Data Source
AI summary
A semiconductor device testing apparatus 1A includes a tester unit 16 that generates an operational pulse signal, an optical sensor 10 that outputs a detection signal as a response to the operational pulse signal, a pulse generator 17 that generates a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal, a spectrum analyzer 13 that receives the detection signal and acquires a phase and amplitude of the detection signal at a detection frequency, a spectrum analyzer 14 that receives the reference signal and acquires a phase of the reference signal at a detection frequency, and an analysis control unit 18 that acquires a time waveform of the detection signal based on the phase and the amplitude of the detection signal acquired by the spectrum analyzer 13 and the phase of the reference signal acquired by the spectrum analyzer 14.