Fresnel Acoustic Wave Resonator Surfaces for Higher Q

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Solution Overview

Problem

Existing acoustic wave resonators have quality factors (Q) that are 10 to 100 times lower than the intrinsic limitations of piezoelectric material, limiting their performance in modern wireless communication devices due to inefficient retention of acoustic energy.

Innovation Solution

Incorporating Fresnel features on the surfaces of acoustic wave resonators, which are patterned analogous to Fresnel lenses, to confine and retain acoustic energy, effectively increasing the quality factor by directing energy towards a central portion and reducing spurious modes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional acoustic wave resonators are used, then the device structure is simple, but the quality factor is 10 to 100 times lower than the intrinsic limitations of piezoelectric material due to inefficient retention of acoustic energy

Engineering Contradiction:
Improvequality factorVSAvoidresonator structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The resonator surface is segmented into multiple Fresnel zones with alternating reflective and transmissive regions, creating a patterned surface that directs acoustic energy toward the central portion. This segmentation allows the resonator to confine acoustic energy more effectively, increasing the quality factor by 10 to 100 times compared to conventional designs.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The Fresnel surface introduces curved reflective zones that redirect acoustic waves toward the center of the resonator. The curved geometry of the Fresnel zones focuses acoustic energy similarly to how a lens focuses light, improving energy retention and spurious mode rejection without requiring a completely new resonator architecture.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Reliability

If Fresnel features are incorporated to confine acoustic energy, then the quality factor increases by a factor of two or higher, but the manufacturing complexity increases due to patterned surfaces

Engineering Contradiction:
Improvequality factorVSAvoidFresnel surface fabrication
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The Fresnel surface is divided into discrete zones that can be fabricated using standard photolithography and etching processes. Each zone is defined by concentric circular patterns that are segmented into reflective and transmissive regions, allowing conventional semiconductor manufacturing techniques to be used despite the complex geometry.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The Fresnel zones are designed with specific radial distances and angular widths that optimize acoustic energy confinement. By carefully controlling the parameters of zone radius, width, and reflectivity, the design achieves high quality factor while remaining compatible with standard fabrication tolerances and processes.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If Fresnel surfaces are used to direct energy to central portion, then spurious modes are reduced and clock signal accuracy improves, but the device complexity and fabrication difficulty increase

Engineering Contradiction:
Improveclock signal accuracyVSAvoidFresnel electrode pattern
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The Fresnel electrode pattern uses concentric circular zones with varying reflectivity to focus acoustic energy toward the center of the resonator. This curved geometric approach naturally suppresses spurious modes by directing energy away from edges and toward the fundamental mode region, improving clock signal accuracy without requiring asymmetric or irregular patterns.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The Fresnel surface serves multiple functions simultaneously: it confines acoustic energy to increase quality factor, directs energy to suppress spurious modes, and maintains compatibility with standard fabrication processes. This multi-functionality reduces the need for additional components or complex processing steps.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The implementation of Fresnel features increases the quality factor of acoustic wave resonators by a factor of two or higher, enhancing the performance of systems that rely on these devices by improving the accuracy and noise level of clock signals.

Implementation Method 1

the Fresnel surface includes a plurality of recessed features and/or protruding features at different locations on the Fresnel surface, each of the plurality of features to confine main mode acoustic energy from a respective portion of the Fresnel surface in a central portion of the acoustic wave resonator

Methodology Applied
Scientific EffectAcoustic wave reflection and focusing: Reflection

Implementation Method 2

electrodes (e.g., contacts, metal patches, etc.) excite acoustic waves in piezoelectric material. The acoustic waves of specific frequencies are generated within a resonant cavity forming an electrical resonant response

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS11418166B2Acoustic wave resonators having fresnel surfaces
Publication Date: 2022.08.16 TEXAS INSTRUMENTS INC
  • US11418166B2 patent drawing
  • US11418166B2 patent drawing

AI summary

An example integrated circuit package includes an acoustic wave resonator, the acoustic wave resonator including a Fresnel surface. In some examples, the Fresnel surface includes a plurality of recessed features and/or protruding features at different locations on the Fresnel surface, each of the plurality of features to confine main mode acoustic energy from a respective portion of the Fresnel surface in a central portion of the acoustic wave resonator.