Frontside Heat Extraction Structure for RF Power Die Hot Spots

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Solution Overview

Problem

Conventional heat dissipation solutions for power amplifier devices are inadequate in efficiently dissipating excess heat generated by RF power dies, particularly at higher frequencies and with high power density die technologies, leading to undesirably elevated local temperatures and thermal build-up.

Innovation Solution

Incorporation of a frontside heat extraction structure with a high thermal conductivity material that directly extracts heat from the transistor channels of the RF power die and transports it to the heatsink regions of the substrate, bypassing the bulk of the die, using materials like graphite, graphene, or carbon nanotubes, and optionally coupled with a retention clip for mechanical fixation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional heatsink substrates are used to dissipate heat from RF power dies, then some heat dissipation is achieved, but local temperatures and hot spots remain undesirably elevated

Engineering Contradiction:
Improvelocal transistor channel temperatureVSAvoiddevice thermal management adequacy
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent introduces a new dimensional approach to heat extraction by placing a thermally-conductive material in direct contact with the frontside upper surface of the RF power die, vertically above the transistor channel. This creates a three-dimensional heat extraction path that bypasses the bulk of the die, contrasting with conventional two-dimensional backside heat extraction through the substrate alone.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent introduces an intermediary thermally-conductive material (such as graphite, graphene, or diamond) positioned between the RF power die and the substrate. This intermediary material serves as a thermal bridge that directly conducts heat from the transistor channel region to the substrate, enhancing the heat dissipation pathway without requiring changes to the die or substrate themselves.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If higher frequency operations and high power density die technologies are used, then device performance is improved, but heat dissipation becomes inadequate and thermal build-up increases

Engineering Contradiction:
Improvedevice operating frequency and power densityVSAvoidexcess heat and thermal build-up
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The patent employs composite material structures combining the RF power die with a thermally-conductive material having superior thermal properties (such as graphite, graphene, or diamond) that is directly coupled to the die frontside. This composite structure enables high frequency and high power density operations by providing an enhanced thermal management solution that does not compromise device performance.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Significantly reduces local transistor channel temperatures and enhances heat dissipation, making the devices suitable for higher frequency operations and power dense die technologies.

Implementation Method 1

a frontside heat extraction structure (18) providing an enhanced heat flow path from locations adjacent transistor channels to a thermally-conductive substrate (30) to which the RF power die (22) is attached

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

When at least partly composed of a metal or another thermally-conductive material, the substrate may serve as a heatsink to help conductively absorb and dissipate some fraction of the excess heat generated during device operation

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

Incorporation of a frontside heat extraction structure with a high thermal conductivity material that directly extracts heat from the transistor channels of the RF power die and transports it to the heatsink regions of the substrate

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP3910668B1Power amplifier devices containing frontside heat extraction structures
Publication Date: 2025.10.15 NXP USA INC
  • EP3910668B1 patent drawingFigure 1~2
  • EP3910668B1 patent drawingFigure 3~4
  • EP3910668B1 patent drawingFigure 5~6

AI summary

Power amplifier devices and methods for fabricating power amplifier devices containing frontside heat extraction structures are disclosed. In embodiments, the power amplifier device includes a substrate, a radio frequency (RF) power die bonded to a die support surface of the substrate, and a frontside heat extraction structure further attached to the die support surface. The frontside heat extraction structure includes, in turn, a transistor-overlay portion in direct thermal contact with a frontside of the RF power die, a first heatsink coupling portion thermally coupled to a heatsink region of the substrate, and a primary heat extraction path extending from the transistor-overlay portion to the first heatsink coupling portion. The primary heat extraction path promotes conductive heat transfer from the RF power die to the heatsink region and reduce local temperatures within a transistor channel of the RF power die during operation of the power amplifier device.