Miniature FT-MIR Spectrometer with Metasurface Emitter and Detector

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Solution Overview

Problem

Conventional FT-IR spectrometers are bulky and costly, limiting their miniaturization for downhole applications in the oil and gas industry, where high-resolution chemical analysis is needed for hydrocarbons, and existing on-chip designs suffer from low spectral resolution and require cryogenic cooling.

Innovation Solution

A miniature Fourier transform mid-infrared (FT-MIR) spectrometer using a metasurface IR source and uncooled metasurface microbolometer detector, integrated with a microelectromechanical (MEMS) interferometer, which does not require cooling and achieves high spectral resolution within a compact, centimeter-scale form factor.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional FT-IR spectrometers are miniaturized for downhole applications, then device size is reduced, but spectral resolution deteriorates

Engineering Contradiction:
Improvedevice sizeVSAvoidspectral resolution
Core Design Contradiction:
Volume of moving objectVSMeasurement precision

Solution Approach 1:

The device is segmented into distinct functional modules: a MEMS interferometer chip for spectral measurement, a separate metasurface infrared source, and a metasurface microbolometer detector. This segmentation allows each component to be optimized independently, enabling the interferometer to maintain high spectral resolution while the overall device achieves compact downhole-form-factor dimensions

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from conventional bulk optical components to planar metasurface structures with sub-wavelength features. The metasurface source and detector use two-dimensional patterned structures that manipulate infrared radiation in the spectral domain, enabling high-resolution spectroscopy in a dramatically reduced footprint compared to traditional three-dimensional optical paths

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Device complexity

If conventional detectors are used in miniaturized spectrometers, then device complexity is reduced, but operational reliability deteriorates due to cryogenic cooling requirements

Engineering Contradiction:
Improvecooling system complexityVSAvoidoperational reliability in downhole environment
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent replaces the mechanical cryogenic cooling system with a purely thermal detection approach using uncooled microbolometers. These detectors measure infrared radiation through thermal absorption and resistance changes, eliminating moving parts, refrigerants, and complex thermal management systems while maintaining detector functionality in harsh downhole temperature and pressure environments

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Volume of moving object

If on-chip interferometer designs are used, then device size is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvedevice sizeVSAvoidfabrication precision
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The patent employs standard semiconductor fabrication parameters and materials (silicon nitride membranes, aluminum mirrors, chromium adhesion layers) with commercially available process capabilities. The MEMS interferometer chip uses conventional thin-film deposition and release techniques, while the metasurface structures use standard photolithography patterning, aligning fabrication requirements with existing manufacturing capabilities rather than demanding ultra-precise specialized processes

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables real-time, high-resolution chemical analysis of downhole hydrocarbons with a spectral resolution of 12.7 cm−1, compatible with laboratory-grade instruments, while being compact enough for downhole deployment and eliminating the need for cryogenic cooling.

Implementation Method 1

a metasurface IR source to emit radiation when heated

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

a microelectromechanical (MEMS) interferometer, and a metasurface microbolometer to measure an interferogram from the MEMS interferometer

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 3

a metasurface microbolometer to measure an interferogram from the MEMS interferometer

Methodology Applied
Scientific EffectBolometer effect: Bolometer

Data Source

PatentUS11988599B2Miniature FT-MIR using a MEMS interferometer with a metasurface emitter and detector
Publication Date: 2024.05.21 SAUDI ARABIAN OIL CO
  • US11988599B2 patent drawing
  • US11988599B2 patent drawing
  • US11988599B2 patent drawing

AI summary

A miniature Fourier transform mid-infrared (FT-MIR) spectrometer is provided. The FT-MIR includes a metasurface IR source to emit radiation when heated, a microelectromechanical (MEMS) interferometer, and a metasurface microbolometer to measure an interferogram from the MEMS interferometer, wherein the miniature FT-MIR spectrometer is less than about 20 mm in outer diameter.