Fuel Particulate Interceptor for EUV Lithography
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Solution Overview
Problem
EUV lithographic apparatuses face challenges with fuel debris accumulation and contamination in the radiation source, which can damage optics and reduce EUV power, as existing solutions require large buffer gas flows that can destabilize the plasma region and lead to fuel deposition on chamber walls.
Innovation Solution
A fuel particulate interceptor module is introduced, made from fuel-resistant materials with affinity for the fuel, positioned to intercept and trap fuel debris before it reaches the radiation collector, using debris-trapping foils and a rotatable design to manage particulates and prevent accumulation on chamber surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a large flow of buffer gas is used to stop ions and prevent debris from reaching the radiation collector, then the protection of optics is improved, but the plasma region becomes unstable and fuel deposition on chamber walls increases
Solution Approach 1:
A buffer gas (such as helium or neon) is introduced as an intermediary substance between the plasma region and the radiation collector. The buffer gas molecules collide with and slow down the fuel debris and ions, preventing them from reaching and damaging the radiation collector mirrors while using a controlled flow rate that maintains plasma stability
2Object-affected harmful factors
If a buffer gas is used to stop debris, then the radiation collector is protected, but large pumps and large supply of buffer gas are required
Solution Approach 1:
The flow rate of the buffer gas is optimized to a controlled, reduced level that is sufficient to stop fuel debris and protect the radiation collector. This parameter optimization eliminates the need for large pumps and extensive buffer gas supply infrastructure, reducing system complexity and cost
3Object-affected harmful factors
If buffer gas flow is increased to stop debris, then the radiation collector is better protected, but fuel deposition on chamber walls increases
Solution Approach 1:
The buffer gas flow rate is precisely controlled at an optimized level that provides sufficient protection to the radiation collector while minimizing the transport of fuel debris to chamber walls. This controlled parameter prevents excessive fuel deposition and maintains source efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively removes fuel debris from the EUV radiation source, preventing damage to optics and maintaining plasma stability by intercepting and removing particulates, thereby enhancing the longevity and efficiency of the EUV source.
Implementation Method 1
a laser configured to emit a beam of radiation to a plasma formation site so that a plasma that emits extreme ultraviolet radiation is generated when the beam of radiation impacts the fuel
Implementation Method 2
a heater configured to heat the fuel particulate interceptor to a temperature greater than a melting temperature of the fuel
Implementation Method 3
a fuel particulate interceptor configured to shield at least part of the chamber from fuel particulates emitted by the plasma
Data Source
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AI summary
A radiation source is configured to generate extreme ultraviolet radiation. The radiation source includes a chamber, a fuel supply configured to supply a fuel to a plasma formation site within the chamber, and a laser configured to emit a beam of radiation to the plasma formation site so that a plasma that emits extreme ultraviolet radiation is generated when the beam of radiation impacts the fuel. A fuel particulate interceptor is arranged in the chamber and comprises a material having an affinity for the fuel so that when the fuel particulates impact a surface of the fuel particulate interceptor, the fuel particulates will adhere to the surface. The fuel particulate interceptor is arranged relative to a reflective element so as to prevent any fuel particulates from falling under the influence of gravity onto the reflective element.