Full-Reflection Display Substrate Etch Stop Pattern
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Solution Overview
Problem
In full-reflection display devices, bonding defects occur during the wet-etching process for forming the reflection layer, leading to adverse signal transmission and display defects due to etching of the bonding pin.
Innovation Solution
A full-reflection display substrate is designed with an etch stop pattern made of the same material as the reflection layer, covering the side surfaces of the bonding pin to prevent etching and ensure stable signal transmission.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a wet-etching process is used to form the reflection layer, then the reflection layer can be effectively formed, but the bonding pin is etched and causes bonding defects
Solution Approach 1:
The patent applies preliminary action by forming the etch stop pattern before the wet-etching process. The etch stop pattern is created in advance using a separate photolithography and etching process, which then serves as a protective mask during the subsequent reflection layer formation. This preliminary preparation prevents the bonding pin from being etched while still allowing the reflection layer to be formed effectively.
Solution Approach 2:
The etch stop pattern acts as an intermediary element between the etching solution and the bonding pin. It is formed from the same conductive film layer material as the reflection layer, creating a protective barrier that mediates the wet-etching process. The etch stop pattern allows the etching solution to access and etch the reflection layer areas while blocking the bonding pin from direct contact with the etching solution.
2Ease of operation
If the bonding pin is exposed after formation, then it can be coupled to the driving IC, but it becomes vulnerable to etching during reflection layer formation
Solution Approach 1:
The patent applies preliminary anti-action by creating the etch stop pattern in advance to counteract the harmful etching effect before it can damage the bonding pin. The etch stop pattern is positioned to directly oppose the etching solution's path toward the bonding pin, creating a protective barrier that prevents the harmful etching action from occurring during the reflection layer formation process.
Solution Approach 2:
The etch stop pattern serves as an intermediary protective layer between the bonding pin and the etching environment. It allows the bonding pin to remain exposed for coupling operations while simultaneously protecting it from the harmful etching solution during reflection layer formation, thus mediating between the need for exposure and the need for protection.
3Device complexity
If no protective structure is added, then the manufacturing process is simple, but bonding defects occur and signal transmission is adversely affected
Solution Approach 1:
The patent merges the etch stop pattern with the existing conductive film layer structure. Both the reflection layer and the etch stop pattern are formed from the same conductive film layer material through a unified photolithography and etching process. This merging approach allows the protective function to be integrated into the existing manufacturing flow without adding separate complex processes, thus protecting the bonding pin while minimizing increases in device complexity.
Data Source
AI summary
The present disclosure provides a full-reflection display substrate, a manufacturing method thereof and a full-reflection display device. The full-reflection display substrate includes: a base substrate, the base substrate including a display region and a non-display region; a signal line arranged in the display region; a bonding pin arranged in the non-display region, coupled to the signal line and bonded to a driving circuitry; a reflection layer arranged in the display region; and an etch stop pattern arranged at a same layer and made of a same material as the reflection layer, arranged in the non-display region, and at least covering a side surface of the bonding pin.


