Electrically Functional Heat Transfer Structures for Stacked Dies

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Solution Overview

Problem

The challenge of efficiently dissipating heat in vertically stacked semiconductor packages is significant, leading to elevated operating temperatures that exceed maximum limits, particularly in devices with increased processing power and reduced footprint.

Innovation Solution

Incorporating electrically functional heat transfer structures (HTS) that are positioned adjacent to the die stack, utilizing materials like silicon volumes to form capacitors, which provide both electrical functionality and efficient heat transfer, thereby reducing operating temperatures and enabling smaller package sizes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If vertically stacked semiconductor dies are used to increase processing power without increasing package footprint, then functional capacity and processing power are improved, but heat dissipation becomes difficult and operating temperatures exceed maximum limits

Engineering Contradiction:
Improveprocessing powerVSAvoidoperating temperature
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The patent transitions from planar heat dissipation to three-dimensional heat transfer by positioning heat transfer structures in the vertical dimension adjacent to the die stack. The HTS extends vertically to contact multiple dies at different heights, enabling heat removal in the z-direction rather than only laterally, thus resolving the thermal management challenge of vertically-stacked high-density packages

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent introduces an intermediary heat transfer structure that mediates between the heat-generating die stack and the heat sink. The HTS acts as a thermal conduit with high thermal conductivity, transferring heat from the dies to external cooling structures, thereby preventing direct thermal coupling that would lead to excessive temperature rise

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If vertically stacked semiconductor dies are used to increase functional capacity, then device functionality is improved, but heat generated is difficult to dissipate

Engineering Contradiction:
Improvefunctional capacityVSAvoidheat dissipation efficiency
Core Design Contradiction:
Adaptability or versatilityVSLoss of energy

Solution Approach 1:

The patent implements multi-functionality by designing the heat transfer structure to serve dual purposes: providing efficient thermal management while simultaneously offering electrical functionality. The HTS can be electrically coupled to the die stack to provide additional electrical connections, thereby reducing the need for separate dedicated heat sink structures and improving overall space utilization

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent employs composite material structures for the heat transfer structure, combining materials with high thermal conductivity for efficient heat transfer while incorporating electrically conductive elements to provide electrical functionality. This composite approach enables simultaneous optimization of thermal and electrical performance in a single integrated structure

Inventive Principle:
Principle #40Composite materials

3Temperature

If electrically functional heat transfer structures are used, then heat transfer efficiency is improved and electrical functionality is provided, but device complexity increases

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidstructural complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent merges previously separate functions into a single integrated heat transfer structure. The HTS combines heat dissipation functionality with electrical connection capabilities, eliminating the need for separate dedicated heat sink structures and reducing overall device complexity despite the advanced functionality provided

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent applies partial action by implementing electrical functionality only in the portions of the heat transfer structure where it is most beneficial, rather than making the entire structure electrically active. This selective approach provides necessary electrical connections while minimizing the added complexity

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The HTS structures effectively transfer heat away from the die stack, maintaining optimal operating temperatures while allowing for compact designs with additional space for functional components, enhancing performance and functionality.

Implementation Method 1

The HTS structures effectively transfer heat away from the die stack

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP3586359B1Semiconductor device assemblies with electrically functional heat transfer structures
Publication Date: 2025.10.22 MICRON TECHNOLOGY INC
  • EP3586359B1 patent drawingFigure 1A~1B
  • EP3586359B1 patent drawingFigure 2
  • EP3586359B1 patent drawingFigure 3A~3B

AI summary

Semiconductor device assemblies having stacked semiconductor dies and electrically functional heat transfer structures (HTSs) are disclosed herein. In one embodiment, a semiconductor device assembly includes a first semiconductor die having a mounting surface with a base region and a peripheral region adjacent the base region. At least one second semiconductor die can be electrically coupled to the first semiconductor die at the base region. The device assembly can also include an HTS electrically coupled to the first semiconductor die at the peripheral region.