Functional Molecule Interconnects for 3D Stacked Chips

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Solution Overview

Problem

The complexity and limitations of conventional interconnect structures in integrated circuits, particularly due to the constraints of low-k dielectric materials, restrict the scaling of metallization layers and the packing density of semiconductor devices, and the need for efficient communication between stacked semiconductor chips poses challenges in achieving high transistor density and reliable electrical connections.

Innovation Solution

The use of functional molecules, such as nano wires or conductive polymer chains, positioned within dielectric materials to connect contact pads between semiconductor chips, enabling efficient interconnect structures without requiring complex contact structures like solder bumps or bond pads, and allowing for the adjustment of molecular characteristics to optimize contact performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional metallization layers with low-k dielectric materials are used to increase interconnect density, then the packing density of semiconductor devices is improved, but the mechanical stability of dielectric materials deteriorates and parasitic RC time constants increase

Engineering Contradiction:
Improveinterconnect densityVSAvoidmechanical stability of dielectric materials
Core Design Contradiction:
Quantity of substanceVSStability of the object's composition

Solution Approach 1:

The patent changes the material parameter from conventional low-k dielectric materials to organic dielectric materials with optimized dielectric constants, achieving a balance between interconnect density and mechanical stability. The organic dielectric materials provide sufficient mechanical support while maintaining acceptable parasitic RC time constants for high-density interconnect structures.

Inventive Principle:
Principle #35Parameter changes

2Quantity of substance

If the number of metallization layers is increased to provide desired interconnect density, then the complexity of interconnect structures is improved, but manufacturing precision and reliability deteriorate due to yield losses

Engineering Contradiction:
Improveinterconnect densityVSAvoidyield losses during fabrication
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The patent transitions from planar metallization layers to three-dimensional stacked semiconductor chip configurations with vertical interconnects. This dimensional change enables high interconnect density through vertical stacking rather than horizontal layer multiplication, reducing manufacturing complexity and improving yield by avoiding the compounding difficulties of fabricating numerous thin metallization layers.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If conventional contact structures like solder bumps or bond pads are used to connect stacked semiconductor chips, then reliable electrical connections are achieved, but the lateral dimensions of contact structures increase and packing density decreases

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidlateral dimensions of contact structures
Core Design Contradiction:
ReliabilityVSArea of moving object

Solution Approach 1:

The patent replaces conventional mechanical contact structures (solder bumps, bond pads) with direct vertical alignment and contact of conductive elements between stacked chips. This substitution eliminates the need for large lateral contact structures by using vertically aligned conductive paths that achieve reliable electrical connection with minimal lateral footprint, thereby maximizing packing density.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for a significant reduction in the lateral dimensions of contact structures, enhancing performance by providing fast interconnects between chips and enabling a high packing density with reduced manufacturing complexity, while also allowing for the use of molecular switches to control device operation and communication.

Implementation Method 1

the functional molecules are configured to provide, at least temporarily, electrical conductivity

Methodology Applied
Scientific EffectCharge transport: Conduction (electrical)

Data Source

PatentUS8847404B2Three-dimensional semiconductor device comprising an inter-die connection on the basis of functional molecules
Publication Date: 2014.09.30 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US8847404B2 patent drawing
  • US8847404B2 patent drawing
  • US8847404B2 patent drawing

AI summary

In a stacked chip configuration, the “inter chip” connection is established on the basis of functional molecules, thereby providing a fast and space-efficient communication between the different semiconductor chips.