Functional Panel Sealing Structure for Impurity Diffusion Blocking

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Solution Overview

Problem

Functional elements in devices such as semiconductor and display devices face impairment due to impurity diffusion, which existing sealing methods fail to adequately prevent.

Innovation Solution

A functional panel structure comprising a first and second base with a bonding layer and an insulating layer, where the insulating layer fills openings in the bonding layer, preventing impurity diffusion into the functional layer, and a method involving controlled temperature and gas purging to form an oxide insulating layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a sealing structure with bonding layer is used to enclose functional elements, then the functional elements are protected and sealed, but impurities can still diffuse through the bonding layer into the functional layer

Engineering Contradiction:
Improvesealing effectivenessVSAvoidimpurity diffusion
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

An insulating layer is introduced as an intermediary barrier between the bonding layer and the functional layer. This insulating layer specifically blocks impurity diffusion while allowing the bonding layer to maintain its sealing function, thus resolving the contradiction between sealing effectiveness and impurity prevention

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs a composite structure consisting of multiple layers (sealing substrate, bonding layer, insulating layer, and functional layer) with different material properties. Each layer is selected for its specific function: the bonding layer provides adhesion, while the insulating layer provides impurity barrier properties, creating a composite system that addresses both sealing and contamination prevention

Inventive Principle:
Principle #40Composite materials

2Object-affected harmful factors

If the insulating layer is formed to prevent impurity diffusion, then impurity blocking is improved, but the manufacturing process becomes more complex

Engineering Contradiction:
Improveimpurity diffusion preventionVSAvoidstructure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The insulating layer is designed to serve multiple functions simultaneously: it acts as an impurity barrier, provides electrical insulation, and maintains structural integrity of the layered configuration. This multi-functionality reduces the need for additional specialized layers, thereby limiting the increase in structural complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Ease of manufacture

If existing sealing methods are used, then the manufacturing process is simple, but the functional elements are still susceptible to impurity diffusion

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidfunctional element integrity
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The insulating layer is formed preliminarily during the manufacturing process, before the functional layer is fully assembled or activated. This preliminary formation of the protective barrier ensures that impurity diffusion is prevented from the outset, maintaining functional element integrity without requiring complex post-manufacturing interventions

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents impurity diffusion, enhancing the reliability and convenience of manufacturing functional panels and devices by maintaining the integrity of functional elements.

Implementation Method 1

an insulating layer in contact with the first base, the second base, and the bonding layer... which can prevent impurities from being diffused into the functional layer

Methodology Applied
Scientific EffectImpurity diffusion prevention: Diffusion Barrier

Implementation Method 2

a bonding layer that bonds the second base to one of surfaces of the first base

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS20240032232A1Functional panel, method for manufacturing the same, module, data processing device
Publication Date: 2024.01.25 SEMICON ENERGY LAB CO LTD
  • US20240032232A1 patent drawing
  • US20240032232A1 patent drawing
  • US20240032232A1 patent drawing

AI summary

A novel, highly convenient or reliable functional panel is provided. A novel, highly convenient or reliable method for manufacturing a functional panel is provided. The functional panel includes a first base; a second base having a region overlapping with the first base; a bonding layer that bonds the first base to the second base; and an insulating layer in contact with the first base, the second base, and the bonding layer. With this structure, an opening which is formed easily in a region where the bonding layer is in contact with the first base or the second base can be filled with the insulating layer, which can prevent impurities from being diffused into the functional layer located in a region surrounded by the first base, the second base, and the bonding layer that bonds the first base to the second base.