Decomposing Furnace Fin Agitation for Polymer Conversion
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Solution Overview
Problem
The high cost and inefficiency of hydrolysis-based waste disposal of polymers generated in polycrystalline silicon production processes, along with reduced conversion ratios of polymers to trichlorosilane due to degraded silicon powder flowability, pose significant challenges in the production of high-purity trichlorosilane.
Innovation Solution
An apparatus that introduces hydrogen chloride and polymers containing high boiling point chlorosilanes into a decomposing furnace at high temperatures, utilizing a raw material supplying tube with a fin to agitate and heat the mixture, thereby decomposing the polymers into trichlorosilane, and includes features like pressurized gas injection and spherical rolling members to manage silicon oxide deposition and clogging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If polymers are returned to a fluid reaction container to be separated and used to produce trichlorosilane, then polymer conversion to trichlorosilane is achieved, but silicon powder flowability is degraded and conversion ratio is reduced
Solution Approach 1:
The invention divides the process into two separate reactors: a fluidizing reactor for silicon powder chlorination and a decomposing reactor for polymer decomposition. This segmentation prevents polymer-silicon mixing while enabling both functions to operate optimally, resolving the contradiction between polymer conversion and silicon powder flowability
Solution Approach 2:
The invention extracts the polymer decomposition function from the fluidizing reactor and places it in a separate decomposing reactor. This extraction eliminates the negative interaction between polymers and silicon powder, maintaining silicon powder flowability while still achieving polymer-to-trichlorosilane conversion
2Ease of manufacture
If polymers are disposed of through hydrolysis, then waste disposal is achieved, but costs are expensive and raw material efficiency is low
Solution Approach 1:
The invention converts the harmful waste polymer into a valuable product (trichlorosilane) through decomposition and chemical reaction with hydrogen chloride. This transforms the waste disposal problem into a resource recovery opportunity, eliminating disposal costs and improving raw material efficiency
Solution Approach 2:
Instead of discarding polymers through hydrolysis, the invention recovers them by decomposing and reacting them to produce trichlorosilane. This recovery process eliminates waste disposal costs and improves raw material utilization efficiency
3Productivity
If high temperature decomposition is applied to polymers, then conversion to trichlorosilane is improved, but energy consumption increases
Solution Approach 1:
The invention merges the decomposition reaction with the exothermic reaction between produced trichlorosilane and hydrogen chloride. The heat from this secondary reaction maintains the high temperature needed for decomposition, reducing external energy input while maintaining high conversion efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces waste disposal burdens, increases raw material efficiency, and achieves uniform heating for efficient reactions, while preventing clogging and enhancing the reuse of trichlorosilane, thereby lowering the production costs of polycrystalline silicon.
Implementation Method 1
introduces, into a decomposing furnace, hydrogen chloride and polymer containing high boiling point chlorosilane generated in a polycrystalline silicon producing process, in a trichlorosilane producing or in a converting process, and reacting them with each other at high temperatures such that the polymer decomposes, thereby producing trichlorosilane
Implementation Method 2
a fin is formed integrally with at least one of the outer peripheral surface of the raw material supplying tube or the inner peripheral surface of the decomposing furnace. The fin guides the fluid mixture including the polymer and the hydrogen chloride supplied from the lower end opening of the raw material supplying tube to be agitated and rise upward in the reaction chamber
Implementation Method 3
reacting them with each other at high temperatures such that the polymer decomposes, thereby producing trichlorosilane
Data Source
AI summary
An apparatus for producing trichlorosilane includes: a decomposing furnace (2), a heating unit (8) heating the inside of the decomposing furnace (2), a raw material supplying tube (3) for guiding polymer and hydrogen chloride to be guided to the inner bottom portion of the decomposing furnace (2), and a gas discharge tube (4) for discharging reaction gas from the top of the reaction chamber (13) provided between the outer peripheral surface of the raw material supplying tube (3) and the inner peripheral surface of the decomposing furnace (2), a fin (14), which guides a fluid mixture of the polymer and the hydrogen chloride supplied from the lower end opening (3a) of the raw material supplying tube (3) to be agitated and rise upward in the reaction chamber (13), and is formed integrally with at least one of the outer peripheral surface of the raw material supplying tube (3) and the inner peripheral surface of the decomposing furnace (2).