Furnace Heat Exchange Device for Rapid Cooling
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Solution Overview
Problem
The high-temperature furnace used in photovoltaic cell manufacturing requires a lengthy cooling process after the diffusion process, which reduces processing efficiency, and existing rapid cooling solutions using compressed gas result in high equipment costs due to water vapor generation from cooling the discharged gas.
Innovation Solution
A furnace design incorporating a heat exchange device with a gas flow channel and a cooling medium channel, where the heat exchange gas is cooled through a secondary heat exchange process without phase change, eliminating the need for dedicated water vapor treatment and improving cooling efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If compressed gas is used for rapid cooling of the furnace body, then cooling efficiency is improved, but water vapor generation increases leading to higher equipment costs
Solution Approach 1:
The patent introduces a heat exchanger as an intermediary device between the furnace body and the environment. The heat exchanger includes a heat exchange channel where cooling medium flows to absorb heat from the discharged compressed gas, preventing direct water vapor generation while maintaining rapid cooling effectiveness
Solution Approach 2:
The patent converts the harmful hot compressed gas that would otherwise generate water vapor into a useful heat source for pre-heating the cooling medium. The heat exchanger recovers thermal energy from the discharged gas to pre-heat the cooling medium before it enters the cooling channel, turning a harmful byproduct into a beneficial resource that improves overall system efficiency
2Temperature
If water spraying is used to cool discharged compressed gas, then gas temperature is reduced, but cooling water vaporizes instantly generating large amounts of water vapor requiring special treatment pipes
Solution Approach 1:
The patent replaces direct water spraying with a heat exchanger as an intermediary cooling device. The heat exchanger uses a controlled cooling medium flow through defined channels to gradually reduce gas temperature without causing instant vaporization, eliminating the need for complex water vapor treatment systems
Solution Approach 2:
The patent uses a hydraulic cooling system with controlled fluid flow through the heat exchanger channels. The cooling medium is pumped through the heat exchange channel at controlled rates to efficiently cool the discharged gas without the chaotic vaporization problems of spray cooling, providing a more manageable and less complex system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the cooling efficiency of the furnace body and processing efficiency by effectively cooling the heat exchange gas without water vapor generation, reducing equipment costs and maintaining high-temperature conditions for photovoltaic cell production.
Implementation Method 1
a heat exchange device (2)... wherein the heat exchange device (2) cools the heat exchange gas
Implementation Method 2
the heat exchange device (2) includes a fin assembly (42)... the fin assembly (42) comprises a plurality of fins (422)
Implementation Method 3
introduces compressed gas into the channel, so that the compressed gas absorbs the heat from the furnace body during the cooling process
Data Source
AI summary
A furnace and a semiconductor processing equipment are provided. The furnace includes a furnace body and a heat exchange device, the furnace body includes a furnace tube and an insulation layer disposed around the furnace tube, a heat exchange gas channel is formed between an outer wall of the furnace tube and the insulation layer, the heat exchange gas channel includes a first gas inlet and a first gas outlet. The heat exchange device includes a gas flow channel and a cooling channel, the gas flow channel is connected to the first gas outlet, the cooling channel provides a cooling medium for exchanging heat with a gas in the gas flow channel.