Single Crystal Furnace Heat Transfer Assembly
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Solution Overview
Problem
Existing single crystal furnaces with contactless radiation heat exchange structures cannot achieve both high crystal pulling speed and high crystal pulling quality due to limitations in heat transfer efficiency and the risk of rod collision.
Innovation Solution
A single crystal furnace with a heat transfer assembly that includes a heat transfer member and a heat conduction tool, where the heat transfer member is configured to contact the monocrystalline silicon rod and conduct its heat, and the heat conduction tool is used to enhance heat transfer and prevent rod collisions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If contactless radiation heat exchange structure is used, then crystal pulling speed can be increased to 1.9 mm/min, but heat transfer efficiency is limited and crystal pulling quality cannot be ensured
Solution Approach 1:
A heat transfer assembly consisting of a heat transfer member and heat conduction tool is introduced as an intermediary between the heating device and the monocrystalline silicon rod. The heat transfer member (made of graphite or carbon-carbon composite material) contacts the rod and conducts heat directly to the pulling section, while the heat conduction tool (made of graphite, carbon-carbon, or boron nitride) further enhances heat transfer from the heat transfer member to the rod surface, thereby improving heat transfer efficiency and enabling higher crystal pulling speeds with better quality control
2Speed
If heat transfer structure is moved closer to monocrystalline silicon rod, then crystal pulling speed can be increased, but risk of rod collision and wire breakage increases
Solution Approach 1:
The heat transfer member is designed with dynamic adjustment capability, allowing its position and contact pressure with the monocrystalline silicon rod to be adjusted during the crystal pulling process. This enables the system to adapt to rod diameter changes and positioning variations, maintaining optimal heat transfer while avoiding collision and wire breakage
Solution Approach 2:
The system allows for parameter changes in the heat transfer assembly, including adjustable contact pressure, position, and thermal conductivity properties. By dynamically adjusting these parameters, the system can optimize heat transfer efficiency at different stages of crystal pulling while maintaining safety margins to prevent rod collision and wire breakage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a higher crystal pulling speed, up to 3.0 mm/min, while ensuring high crystal pulling quality by effectively managing heat transfer and preventing rod collisions, thus overcoming the limitations of existing technologies.
Implementation Method 1
the heat transfer assembly is configured to contact with the monocrystalline silicon rod and conduct heat of the monocrystalline silicon rod
Data Source
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AI summary
Embodiments of this application provide a single crystal furnace, a heat conduction tool, and a crystal pulling temperature control method for the single crystal furnace. The single crystal furnace includes a furnace body and a heat transfer assembly. The furnace body is configured to grow a monocrystalline silicon rod. In an axial direction of the furnace body, the heat transfer assembly is arranged in the furnace body. The heat transfer assembly includes a heat transfer member. The heat transfer member is configured to contact with the monocrystalline silicon rod and conduct heat from the monocrystalline silicon rod. According to the single crystal furnace of the embodiments, the temperature of the monocrystalline silicon rod can be rapidly lowered, so that the crystal pulling speed can be further increased. In addition, the risk of collision around the monocrystalline silicon rod can be avoided. Therefore, the single crystal furnace can achieve both a high crystal pulling speed and high crystal pulling quality.