Furnace Injector Mounting With Spacing to Prevent Poly Peeling

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Solution Overview

Problem

Existing injector mounting systems in semiconductor integrated circuit manufacturing devices are prone to adhesion between the injector and the process tube, leading to polysilicon film peeling and product discard.

Innovation Solution

An injector mounting apparatus with an adjustable spacing between the injector and the process tube, achieved through a first mounting component with an injector mounting hole and a flange at the bottom of the process tube, allowing for the adjustment of the distance between the injector edge and the process tube surface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the injector is directly fixed to the process tube using a top thread and gas pipe with a sealing ring, then the injector can be securely mounted, but adhesion occurs between the injector and the inner surface of the process tube causing poly peeling

Engineering Contradiction:

Improvemounting securityVSAvoidadhesion and poly peeling

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent introduces a mounting component as an intermediary between the injector and the process tube. This mounting component includes a mounting hole through which the injector passes, and it features a first spacing from the inner surface of the process tube. The mounting component acts as a mediator that secures the injector while preventing direct contact and adhesion to the process tube inner surface.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The mounting system is segmented into distinct components: the process tube, the mounting component, and the injector. The mounting component is a separate element that provides both secure fixation and spacing functionality, dividing the previously integrated mounting and spacing functions into independent structural elements.

Inventive Principle:

Principle #1Segmentation

2Productivity

If a long injector is used to achieve growth of multiple wafers simultaneously, then productivity increases, but the injector extends closer to the process tube inner surface causing adhesion

Engineering Contradiction:

Improvemulti-wafer growth capabilityVSAvoidadhesion

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The mounting component serves as an intermediary that enables the use of long injectors for multi-wafer processing while preventing adhesion. By positioning the mounting component at a first spacing from the process tube inner surface, it allows the injector to extend sufficiently long to service multiple wafers while maintaining a protective gap that prevents harmful adhesion.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The solution addresses the adhesion problem by introducing a spatial dimension - the first spacing in the radial direction between the mounting component and the process tube inner surface. This dimensional separation allows the injector to achieve the necessary length for multi-wafer growth without the adhesion issue that would occur if it extended directly to the process tube surface.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Manufacturing precision

If the injector extends close to the process tube inner surface, then gas distribution may be improved, but spacing cannot be ensured leading to adhesion

Engineering Contradiction:

Improvegas distribution uniformityVSAvoidspacing consistency

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The mounting component acts as a mediator that ensures consistent spacing between the injector and the process tube inner surface. It provides a stable, reproducible first spacing that maintains both gas distribution effectiveness and prevents adhesion, solving the contradiction between achieving good gas distribution and maintaining reliable spacing.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents adhesion between the injector and the process tube, thereby reducing film layer peeling and improving product yield by ensuring a consistent and uniform polysilicon thin film deposition.

Implementation Method 1

sealed by disposing a sealing ring (o-ring) at a connection position

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Implementation Method 2

fixed by means of a top screw 108

Methodology Applied

Scientific EffectMechanical fastening: Mechanical Fastener

Data Source

PatentUS20250075976A1Injector mounting apparatus of furnace

Publication Date: 2025.03.06 SHANGHAI HUALI MICROELECTRONICS CORP

AI summary

The present application provides an injector mounting apparatus of a furnace, wherein a first injector in the furnace has a main injector pipe. The injector mounting apparatus includes a first mounting component. The first mounting component has an injector mounting hole for the first injector to pass through and be disposed therein, a first edge on a side of the main injector pipe close to the inner side surface of the process tube abuts on a second edge on a side of the injector mounting hole close to the inner side surface of the process tube, and there is a first spacing between the second edge and an outer side face of the first mounting component. A flange is disposed at the bottom of the process tube, and the first mounting component is mounted on the flange by means of a first fixing member.