Vertical Furnace Liner-Flange Assembly for Particle Control
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Solution Overview
Problem
Contamination in the inner space of vertical processing furnaces for substrates is a challenge due to thermal expansion and friction between the liner and flange, leading to particle formation and deposition on substrates.
Innovation Solution
A design that creates a downflow of gases within the inner space of the liner, using a gas injector at the upper end and exhaust openings at the lower end to transport contaminants away from the processed substrates, along with a purge gas system to maintain a low pressure and minimize contact between the liner and flange, and using materials with similar thermal expansion coefficients to reduce friction and deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the liner and flange are assembled separately, then each component can be positioned independently, but the alignment between liner and flange is difficult to achieve
Solution Approach 1:
The assembly method creates a common reference plane (the ground) where both the liner and flange are positioned. By tilting the liner forward during assembly, both components are brought to the same operational state, making alignment straightforward and precise
Data Source
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AI summary
An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising: an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner; a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.