Thermal Treatment Furnace Temperature Control via Virtual Temperature
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Solution Overview
Problem
Existing vertical type thermal treatment furnaces face challenges in achieving precise temperature control across multiple zones due to the distance of in-furnace temperature sensors from the treatment substrates, leading to temperature discrepancies and reduced thermal treatment quality.
Innovation Solution
Implementing a temperature control method that uses profile temperature sensors closer to the substrates, determining correlations between heaters and sensors, and calculating a virtual temperature based on sensor readings to adjust heater power and achieve target temperatures across multiple zones.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If in-furnace temperature sensors are positioned away from treatment substrates to avoid interference, then device complexity is reduced, but temperature measurement precision deteriorates leading to temperature discrepancies
Solution Approach 1:
The patent transitions from single-point temperature measurement to multi-point spatial temperature measurement by arranging multiple profile temperature sensors at different radial positions. This dimensional expansion allows comprehensive temperature field mapping, resolving the contradiction between sensor positioning simplicity and measurement precision through spatial distribution of measurement points.
Solution Approach 2:
The patent introduces a correlation determination mechanism that acts as an intermediary between the temperature sensors and the control system. By establishing correlation relationships between multiple sensor readings and heater zones, this intermediary layer enables accurate temperature control despite the physical distance between sensors and substrates, resolving the measurement precision issue without complicating sensor placement.
2Measurement precision
If multiple profile temperature sensors are used to improve temperature measurement accuracy, then temperature measurement precision is improved, but device complexity increases
Solution Approach 1:
The patent segments the temperature measurement function across multiple profile temperature sensors positioned at different radial locations. Each sensor provides localized temperature data, and the control system processes these segmented measurements collectively. This segmentation approach improves overall measurement precision by capturing temperature variations across the furnace cross-section while managing complexity through modular sensor placement.
Solution Approach 2:
The patent implements a feedback control mechanism where temperature readings from multiple profile sensors are continuously fed back to adjust heater power distribution. The control system uses the correlation relationships to translate sensor readings into targeted heater adjustments, creating a closed-loop feedback system that improves temperature control precision without requiring overly complex manual intervention.
3Device complexity
If heater power is adjusted based on single-point temperature readings, then device complexity is reduced, but manufacturing precision deteriorates due to temperature non-uniformity
Solution Approach 1:
The patent applies local quality control by establishing distinct correlation relationships between different heater zones and corresponding temperature measurement points. Each heater zone is controlled based on its specific thermal characteristics and local temperature readings, allowing differentiated power adjustment for different radial positions. This localizes the control strategy to match the spatial variation in temperature distribution, improving thermal treatment uniformity without requiring overly complex centralized control.
Solution Approach 2:
The patent extends temperature control from single-point to multi-dimensional spatial control by using profile temperature sensors at multiple radial positions. This dimensional expansion enables the control system to address temperature non-uniformity across the furnace cross-section, improving manufacturing precision through spatially-resolved temperature management while maintaining relatively simple control logic through correlation-based adjustments.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces temperature discrepancies and improves the uniformity of thermal treatment by using detected temperatures from multiple sensors to control heaters, ensuring the thermal treatment area reaches the target temperature more accurately.
Implementation Method 1
profile temperature sensors provided in a thermal treatment area of the thermal treatment furnace
Implementation Method 2
controlling the each heater so that the virtual temperature is coincident with the target temperature
Data Source
AI summary
In a temperature control method in which a target temperature is given in a thermal treatment furnace and plural heaters are controlled according to the target temperature, the correlation of the each heater and plural profile temperature sensors provided in the thermal treatment furnace is determined, a virtual temperature is calculated on the basis of the detection temperature of each profile temperature sensor and a weighting factor calculated from the correlation, and the each heater is controlled so that the virtual temperature is coincident with the target temperature.