Fuse Element Opening and Protective Film for Laser Precision
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Solution Overview
Problem
In semiconductor devices, densely packed integrated circuits lead to higher device defects, reducing chip yield, and existing fuse elements are inadequate in preventing moisture interaction and precise laser control, which affects their reliability and lifespan.
Innovation Solution
A fuse element design with a metal layer, dielectric layer, and passivation layers, featuring an opening above the intermediate segment to allow precise laser control and a protective film to prevent moisture interaction, enhancing moisture resistance and lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an opening is disposed above the intermediate segment to allow precise laser control, then laser positioning precision is improved, but the dielectric layer is exposed to external moisture
Solution Approach 1:
A protective film is formed over the exposed dielectric layer and passivation layers within the opening to seal it against moisture while allowing the laser to precisely target the intermediate segment through the same opening
Solution Approach 2:
The protective film is formed in advance before the fuse element is subjected to moisture environments, preemptively preventing moisture ingress to the exposed dielectric layer while maintaining laser access
2Reliability
If a protective film is formed to prevent moisture interaction, then moisture resistance is improved, but the device structure becomes more complex
Solution Approach 1:
The protective film serves multiple functions: it seals the exposed dielectric layer against moisture, protects the passivation layers, and maintains the structural integrity of the fuse element, thereby achieving enhanced reliability without proportionally increasing complexity
3Ease of operation
If the opening penetrates through all layers to the intermediate segment, then laser access is improved, but peripheral elements may be damaged
Solution Approach 1:
The opening is precisely positioned and sized to provide laser access only to the intermediate segment, with the protective film covering the surrounding exposed areas to prevent laser damage to peripheral elements while maintaining ease of operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design allows for precise laser control to avoid peripheral damage, increases moisture resistance, and extends the lifespan of fuse elements by using a protective film that covers exposed passivation layers, improving the reliability of semiconductor devices.
Implementation Method 1
a protective film disposed on a bottom and a portion of a sidewall of the opening, and covering the first passivation layer exposed by the opening
Implementation Method 2
the position of a laser aimed at the intermediate segment can be precisely controlled, and the peripheral elements will not be damaged while the laser is subsequently used to blow the intermediate segment
Data Source
AI summary
A fuse element includes a metal layer disposed on a substrate. The metal layer includes an intermediate segment, a first block and a second block. The first block and the second block are electrically connected to two respective ends of the intermediate segment. The fuse element also includes a dielectric layer covering the intermediate segment, the first block and the second block, a first passivation layer disposed on the dielectric layer, and a second passivation layer disposed on the first passivation layer. The fuse element further includes an opening penetrating through the first passivation layer, the second passivation layer and a portion of the dielectric layer, and located above the intermediate segment. In addition, a protective film is disposed on a bottom and a portion of a sidewall of the opening, and covers the first passivation layer exposed by the opening.