Fuse Set With Multi-Plane Connection Part For Laser Damage Prevention
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Solution Overview
Problem
Conventional semiconductor integrated circuits face increased defect rates due to the higher density of devices, leading to faulty devices and errors during redundancy operations, particularly due to the risk of damaging connection parts during fuse blowing, which can disrupt the entire redundancy process.
Innovation Solution
The solution involves arranging a plurality of fuses with a predetermined spacing and a connection part electrically connecting them, where the connection part is disposed on a different plane from the fuses, ensuring a separation distance that prevents laser interference and damage during fuse blowing, thereby preventing errors in the redundancy operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the connection part is disposed on the same plane as the fuses to simplify the structure, then the device complexity is reduced, but the connection part is likely to be damaged by laser beams during fuse blowing
Solution Approach 1:
The connection part is disposed on a different plane from the fuses, utilizing the third dimension (vertical stacking) to separate components that would otherwise be in the same plane. This spatial separation prevents laser beams from damaging the connection part during fuse blowing while maintaining structural integrity.
2Area of stationary object
If the wiring layers are routed close to the fuse box to reduce area, then the area occupied is minimized, but the wiring layers are likely to be cut off by laser beams during fuse blowing
Solution Approach 1:
The wiring layers are routed on different planes from the fuse box, using vertical stacking to separate the wiring from the fuse blowing area. This prevents laser beams from cutting the wiring layers while maintaining compact area utilization through three-dimensional layout.
Solution Approach 2:
Interlayer dielectric layers are introduced as intermediary structures between the fuse box and wiring layers. These dielectric layers provide physical separation and protection, preventing laser beams from reaching and damaging the wiring layers during the fuse blowing process.
3Area of stationary object
If the address fuses are arranged with small spacing to increase density, then the fuse block area is reduced, but the laser beams may radiate to adjacent wiring layers causing damage
Solution Approach 1:
The address fuses are arranged in a three-dimensional configuration with connection parts on different planes. This vertical arrangement allows for smaller horizontal spacing between fuses while preventing laser radiation from affecting adjacent wiring layers through planar separation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively prevents the connection part from being damaged by laser beams, ensuring accurate fuse blowing and reducing the occurrence of repair errors, thus enhancing the reliability of the redundancy operation and maintaining the integrity of the semiconductor integrated circuit.
Implementation Method 1
laser beams are likely to be radiated to the wiring layers 30a, 30b, 30c and 30d when blowing the fuses, and thereby, the wiring layers 30a, 30b, 30c and 30d are likely to be cut off
Data Source
AI summary
A fuse set includes a first row constituted by a plurality of fuses which are arranged with a first spacing; a second row including a plurality of fuses which are disposed to correspond to the fuses of the first row on the same plane, and separated from the fuses of the first row with a second spacing; and a connection part disposed between the first row and the second row and electrically connected with the plurality of fuses of the first row and the plurality of fuses of the second row, wherein the connection part and the pluralities of fuses of the first and second rows are disposed on different planes.