Fuse Trimming via Substrate Switching for Leakage Control

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Solution Overview

Problem

Existing trimming methods for semiconductor devices face challenges in completely cutting fuse resistors due to high leakage currents, which are often caused by delayed rise times of cutting currents, affecting the accuracy and reliability of electrical characteristic adjustments.

Innovation Solution

The method involves setting switching devices on the semiconductor substrate to a conductive state to direct the cutting current directly to the fuse resistor, bypassing external components that can impede current flow, thereby ensuring a shorter path and faster rise time for the cutting current, allowing for precise cutting of the fuse resistor.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the cutting current path is extended through external components, then the circuit design is simplified, but the rise time of the cutting current increases and leakage current occurs

Engineering Contradiction:
Improvecircuit designVSAvoidcutting completeness
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

A dedicated cutting current supply circuit is introduced as an intermediary component to provide cutting current directly to the fuse resistor through the semiconductor substrate. This mediator circuit includes a current supply unit that generates the cutting current and a control unit that manages the timing and path of the current, thereby achieving complete cutting without relying on external components while maintaining circuit simplicity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The cutting current path is moved from a planar external circuit path to a vertical path through the semiconductor substrate thickness direction. By utilizing the substrate as a current conduction path in the thickness direction, the invention achieves short current path and fast rise time while keeping all components integrated within the semiconductor device structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If the cutting current path is shortened within the semiconductor substrate, then the rise time of the cutting current is reduced and leakage current is minimized, but the circuit design becomes more complex

Engineering Contradiction:
Improvecutting completenessVSAvoidcircuit design
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The semiconductor substrate is designed to serve multiple functions: it acts as both the structural foundation for mounting circuit components and as a current conduction path for the cutting current. The substrate's thickness direction is utilized as a current path, allowing the same physical structure to fulfill both mechanical support and electrical conduction roles, thereby avoiding additional complex external circuitry.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The semiconductor device structure itself is designed to provide the cutting current path functionality. The substrate and internal connections are configured to naturally conduct the cutting current from the power supply unit through the fuse resistor, eliminating the need for external trimming circuits or additional current path structures.

Inventive Principle:
Principle #25Self-service

3Ease of operation

If external components are used to provide cutting current, then the current path is longer and rise time increases, but the internal circuit structure is simpler

Engineering Contradiction:
Improvetrimming processVSAvoidrise time
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The cutting current supply circuit is pre-configured within the semiconductor substrate during manufacturing. The current path through the substrate thickness direction is established in advance, with dedicated power supply units and control circuits positioned to immediately deliver cutting current when needed, eliminating the delay associated with external current path establishment.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces leakage currents and ensures accurate trimming by shortening the cutting current path, leading to improved electrical characteristic adjustments and reduced risk of damaging adjacent components.

Implementation Method 1

the cutting current flows to the switching device... to cut the fuse resistor

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS11670388B2Trimming method
Publication Date: 2023.06.06 FUJI ELECTRIC CO LTD
  • US11670388B2 patent drawing
  • US11670388B2 patent drawing
  • US11670388B2 patent drawing

AI summary

A trimming method for adjusting electrical characteristics of an adjustment circuit, which is provided in a semiconductor substrate, by cutting a fuse resistor provided in the semiconductor substrate. In a case where a cutting current flows to the fuse resistor to cut the fuse resistor, at least one of switching devices provided in the semiconductor substrate is set to a conductible state to make the cutting current flow to the switching device.