FZ Crystal Pulling Power Adaptation via Phase Boundary Detection

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Solution Overview

Problem

The existing FZ method for pulling single crystals requires multiple cameras to determine zone heights, making it cumbersome and less precise for adapting the power of the melting apparatus, which hinders automation and precise control during the formation of a thin neck section.

Innovation Solution

Dynamically adapting the power of the electromagnetic melting apparatus based on the positions of the lower and upper phase boundaries between liquid and solid material, using camera-captured data to regulate the power, allowing for precise control during the formation of the thin neck section and conical sections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multiple cameras are used to determine zone heights, then measurement capability is improved, but device complexity increases

Engineering Contradiction:
Improvezone height measurementVSAvoidnumber of cameras
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines the functions of multiple cameras into a single camera system. Instead of using four separate cameras to capture different regions, one camera is used to capture the entire process zone, and image processing techniques are applied to extract information about different regions from this single image, thereby reducing device complexity while maintaining measurement capability

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The single camera is designed to perform multiple functions: capturing the process zone, determining zone height, and providing measurement data for power adaptation. This multi-functional approach replaces the need for multiple specialized cameras, simplifying the overall system

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Loss of information

If four cameras are used to capture different regions, then information completeness is improved, but ease of operation deteriorates

Engineering Contradiction:
Improveregion informationVSAvoidsystem operation
Core Design Contradiction:
Loss of informationVSEase of operation

Solution Approach 1:

Multiple camera functions are merged into a single camera system with image processing. The single camera captures the entire process zone, and software algorithms extract region-specific information, making the system easier to operate by eliminating the complexity of coordinating multiple cameras while preserving complete region information

Inventive Principle:
Principle #5Merging (Combining)

3Manufacturing precision

If dynamic power adaptation is implemented, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:
Improvethin neck section formationVSAvoidpower control system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system implements feedback control by continuously monitoring the position of phase boundaries through image capture and using this information to dynamically adapt the power of the melting apparatus. This feedback mechanism enables precise control of the thin neck section formation process while maintaining manageable system complexity through automated control algorithms

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The power of the melting apparatus is made dynamic rather than static, allowing real-time adaptation based on the position of phase boundaries. This dynamic control enables precise manufacturing of the thin neck section by adjusting power parameters in response to changing process conditions

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables easier and more precise adaptation of the melting apparatus power, facilitating automation and improving the formation of desired crystal structures by stabilizing the phase boundaries and energy coupling, leading to higher precision in crystal growth.

Implementation Method 1

a polycrystal is melted by means of an electromagnetic melting apparatus

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

melting a lower end of the polycrystal by means of the melting apparatus

Methodology Applied
Scientific EffectInduction heating: Induction Heating

Implementation Method 3

the polycrystal in this case is first of all melted and then recrystallized on a monocrystalline seed

Methodology Applied
Scientific EffectCrystallization: Crystallisation

Data Source

PatentUS10907271B2Method for pulling a single crystal by the FZ method comprising dynamically adapting the power of a melting apparatus based on a position of lower and upper phase boundaries
Publication Date: 2021.02.02 SILTRONIC AG
  • US10907271B2 patent drawing
  • US10907271B2 patent drawing
  • US10907271B2 patent drawing

AI summary

A single crystal is pulled by the FZ method, in which in a first phase, a lower end of the polycrystal is melted by the melting apparatus, in a second phase, a monocrystalline seed is attached to the lower end of the polycrystal, and in a third phase, between a lower section of the seed and the polycrystal, a thin neck section is formed whose diameter is smaller than that of the seed, where the power of the melting apparatus before the third phase is dynamically adapted in dependence on a position of a lower phase boundary (PU) between liquid material and solid material on the part of the seed, and where the power of the melting apparatus during the third phase is dynamically adapted in dependence on the position of an upper phase boundary (PO) between liquid material and solid material on the part of the polycrystal plant.