GAA Electrochemical Memory Cell with Interface Layer

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Solution Overview

Problem

Existing semiconductor memory technologies face challenges in achieving high operational speed, low power consumption, and improved integration degree due to limitations in the accuracy of resistance ratios in electrochemical memory cells.

Innovation Solution

The proposed solution involves an electrochemical memory cell design that includes nano patterns with a gate all around (GAA) structure, an interface layer, and a gate that surrounds the nano patterns, allowing for ion exchange across all surfaces for improved memory operations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional electrochemical memory cell structure is used, then manufacturing is simpler, but operational speed and set/reset ratio accuracy deteriorate

Engineering Contradiction:
Improveoperational speedVSAvoidcell structure complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The channel region is divided into multiple segments stacked vertically, with each segment having its own gate electrode. This segmentation increases the total gate-channel interaction surface area, improving ion exchange efficiency and operational speed while maintaining manageable structural complexity through modular stacking

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The memory cell transitions from a planar 2D structure to a 3D stacked structure with gates wrapping around channel segments in multiple dimensions. This dimensional change increases the effective gate control surface area without proportionally increasing footprint area, improving operational characteristics

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Use of energy by moving object

If conventional memory cell structure is used, then device complexity is lower, but power consumption increases

Engineering Contradiction:
Improvepower consumptionVSAvoidinterface layer structure
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

An interface layer is introduced between the channel region and gate electrode to mediate ion exchange. This intermediary layer enables more efficient and controlled ion transfer, reducing the energy required for switching operations while adding only moderate structural complexity

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The interface layer modifies the chemical and electrical parameters at the gate-channel boundary, optimizing ion exchange kinetics and reducing the voltage required for switching, thereby decreasing power consumption

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If conventional electrochemical memory cell is used, then manufacturing precision requirements are lower, but set/reset ratio accuracy deteriorates

Engineering Contradiction:
Improveset/reset ratio accuracyVSAvoidnano pattern alignment
Core Design Contradiction:
Measurement precisionVSManufacturing precision

Solution Approach 1:

The channel is segmented into multiple discrete regions that can be independently controlled by separate gates. This segmentation allows for more precise control of resistance states and improves set/reset ratio accuracy while distributing the manufacturing precision requirements across multiple smaller, more manageable features

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the channel can have locally optimized properties through the interface layer and gate configuration, allowing tailoring of ion exchange characteristics in specific areas to achieve desired set/reset ratios without requiring uniform high precision across the entire structure

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the set/reset ratio, reduces power consumption, and enables rapid operation by facilitating efficient ion exchange and resistance changes across all surfaces of the nano patterns.

Implementation Method 1

The electrochemical memory cell may perform a memory operation by an ion exchange with a channel in accordance with a gate voltage (or a gate current)

Methodology Applied
Scientific EffectIon exchange: Ion Exchange

Implementation Method 2

at least one of the nano patterns, the gate and the interface layer may include a material generating ions in an electrochemical reaction to be used for a memory operation

Methodology Applied
Scientific EffectElectrochemical reaction:

Implementation Method 3

The nano patterns may include a variable resistance material

Methodology Applied
Scientific EffectVariable resistance: Electrical Resistance

Data Source

PatentUS20250194440A1Electrochemical memory cell, neural network memory including the electrochemical memory cell
Publication Date: 2025.06.12 SK HYNIX INC
  • US20250194440A1 patent drawing
  • US20250194440A1 patent drawing
  • US20250194440A1 patent drawing

AI summary

An electrochemical memory cell may include a plurality of nano patterns, a gate and an interface layer. The nano patterns may be stacked on an active region by a set gap. The gate may surround all surfaces of each of the nano patterns. The interface layer may be interposed between the nano patterns and the gate. The nano patterns may include a variable resistance material.