GaAs Chip Edge Anodic Reaction for Moisture Resistance

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Solution Overview

Problem

Resin-sealed semiconductor devices with GaAs chips suffer from moisture penetration in high temperature and high humidity environments, leading to oxidation and degradation of the chip surface around metal electrodes and the device region.

Innovation Solution

A semiconductor device design that includes a GaAs chip with a p-type and n-type layer, metal electrodes along the edges, a semi-insulating region between the electrodes and the device region, and a connecting portion outside the semi-insulating region to electrically connect the p-type GaAs layer to the metal electrodes, promoting anodic reactions at the edges and preventing oxidation of the chip surface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a GaAs chip is sealed with resin, then the device is protected and encapsulated, but moisture penetrates through the resin surface or interface in high temperature and humidity environments causing oxidation and degradation

Engineering Contradiction:
Improvemoisture resistanceVSAvoidmoisture penetration
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A connecting portion is introduced as an intermediary element between the metal electrode and the p-type GaAs layer. This connecting portion serves as a mediator that establishes a preferred anodic reaction site, thereby protecting the device region from moisture-induced oxidation. The connecting portion acts as a sacrificial element that redirects electrochemical reactions away from critical device areas.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of operation

If metal electrodes are formed along the edges of the GaAs chip, then electrical connections are established, but the chip surface around the electrodes becomes susceptible to oxidation when positive voltage is applied in humid conditions

Engineering Contradiction:
Improveelectrical connectionVSAvoidsurface oxidation
Core Design Contradiction:
Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The invention converts the harmful oxidation effect into a beneficial protective mechanism by deliberately creating a preferred anodic reaction site at the connecting portion. The oxidation that would normally damage the device region is redirected to occur at the connecting portion instead, which is designed to withstand such reactions. This transforms the harmful electrochemical oxidation into a protective mechanism that shields the critical device region.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

3Reliability

If a semi-insulating region is formed between the metal electrode and device region, then electrical isolation is achieved, but the connecting portion must be disposed outside this region to maintain electrical connection

Engineering Contradiction:
Improveelectrical isolationVSAvoidstructural complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention segments the electrical connection path into distinct functional regions: the semi-insulating region provides electrical isolation between the metal electrode and the device region, while the connecting portion disposed outside the semi-insulating region provides the electrical connection path. This segmentation allows simultaneous achievement of electrical isolation and connection by spatially separating these functions into different regions of the chip structure.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the moisture resistance of the GaAs chip by directing anodic reactions to the edges of the chip, thereby preventing surface oxidation and device degradation in high humidity conditions.

Implementation Method 1

promoting anodic reactions at the edges and preventing oxidation of the chip surface

Methodology Applied
Scientific EffectAnodic reaction: Oxidation

Data Source

PatentUS7719087B2Semiconductor device
Publication Date: 2010.05.18 MURATA MFG CO LTD
  • US7719087B2 patent drawing
  • US7719087B2 patent drawing
  • US7719087B2 patent drawing

AI summary

A semiconductor device includes: a GaAs chip; and a resin sealing the GaAs chip. The GaAs chip includes: a p-type GaAs layer; an n-type GaAs layer on the p-type GaAs layer; a metal electrode located on the n-type GaAs layer along an edge of the GaAs chip and to which a positive voltage is applied; a device region located in a central portion of the GaAs chip; a semi-insulating region located between the metal electrode and the device region and extending in the p-type GaAs layer and the n-type GaAs layer; and a connecting portion disposed outside the semi-insulating region and electrically connecting the p-type GaAs layer to the metal electrode.