Lateral p-i-n GaAs Membrane Laser for Optical and Carrier Confinement

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Solution Overview

Problem

Current optoelectronic devices with III-V semiconductor membranes forming lateral p-i-n junctions face limitations in performance, particularly in terms of optical confinement and charge carrier confinement, leading to inefficiencies in light emission and electrical properties.

Innovation Solution

An optoelectronic device is designed with a semiconductor membrane made of crystalline GaAs, featuring quantum dots in the central portion and Al x Ga 1-x As doped lateral portions, where the proportion of aluminum x is between 0.05 and 0.30, and electrodes for lateral charge carrier injection, all supported by a SOI substrate with dielectric layers for improved optical and electrical performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a III-V semiconductor membrane forms a lateral p-i-n junction with doped lateral portions, then charge carrier injection is improved, but optical confinement and charge carrier leakage are insufficient

Engineering Contradiction:
Improvecharge carrier injection efficiencyVSAvoidcharge carrier leakage
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent applies local quality by creating distinct regions with different materials and properties: the central active portion uses GaAs for optimal optical properties, while the lateral cladding portions use AlGaAs with varying aluminum compositions (x=0.05 to 0.30) to provide both electrical confinement and optical guidance. This spatial differentiation of material properties simultaneously achieves effective charge carrier injection into the active region while preventing carrier leakage through the optimized band structure of the AlGaAs cladding.

Inventive Principle:
Principle #3Local quality

2Reliability

If the aluminum proportion x in Al x Ga 1-x As is increased to improve optical confinement, then optical confinement is enhanced, but electrical properties and charge carrier mobility deteriorate

Engineering Contradiction:
Improveoptical confinementVSAvoidcharge carrier mobility
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent employs parameter changes by systematically varying the aluminum composition parameter x in AlGaAs across different lateral cladding regions, with x ranging from 0.05 to 0.30. This continuous parameter adjustment allows optimization of the band gap and refractive index to achieve adequate optical confinement while maintaining sufficient charge carrier mobility for efficient electrical operation. The specific composition range balances the competing requirements of optical guidance and electrical transport.

Inventive Principle:
Principle #35Parameter changes

3Temperature

If a semiconductor membrane structure is used to reduce sensitivity to crystal defects, then operating temperature is improved, but manufacturing precision and control of optical confinement are challenging

Engineering Contradiction:
Improveoperating temperatureVSAvoidoptical confinement control
Core Design Contradiction:
TemperatureVSManufacturing precision

Solution Approach 1:

The patent utilizes composite materials by integrating multiple III-V semiconductor compounds (GaAs and AlGaAs) with different band gaps and refractive indices into a single lateral p-i-n junction structure. This composite approach enables the device to achieve higher operating temperature stability while the carefully engineered interface between materials provides precise control over optical confinement through refractive index contrast, overcoming the manufacturing challenges through material property optimization rather than extreme dimensional precision.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves enhanced optical confinement and reduced charge carrier leakage, resulting in improved operating temperature, reduced threshold current, and lower sensitivity to crystal defects, with optimized optical and electrical properties.

Implementation Method 1

The central portion (22) is made from an intrinsic material, namely GaAs, and comprises quantum dots

Methodology Applied
Scientific EffectRadiative recombination: Luminescence

Implementation Method 2

The optoelectronic device comprises a support substrate (10) of silicon on insulator (SOI) type... a second dielectric layer (26) covering the semiconductor membrane (20)

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 3

The semiconductor membrane (20) comprises a lateral portion (21.1, 21.2) doped with n type or p type... forming a lateral pin junction

Methodology Applied
Scientific EffectCharge carrier drift and diffusion: Diffusion

Data Source

PatentEP4254687B1Optoelectronic device comprising a laser source with a iii-v semiconductor membrane forming a lateral p-i-n junction
Publication Date: 2024.06.05 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP4254687B1 patent drawingFigure 1A~1B
  • EP4254687B1 patent drawingFigure 2A~2B
  • EP4254687B1 patent drawingFigure 3A~3C

AI summary

The invention relates to an optoelectronic device comprising: a laser source (2) including a semiconductor membrane (20) resting on a first dielectric layer (14) formed of an n-type doped lateral portion (21.1), a p-type doped lateral portion (21.2), and an optically active central portion (22) located between and in contact with the doped lateral portions (21.1, 21.2) to form a pin lateral junction extending parallel to the main plane. The semiconductor membrane (20) is made of crystalline GaAs, the central portion (22) comprising GaAs-based quantum dots, and the doped lateral portions (21.1, 21.2) being made of AlxGa1-xAs with an aluminum content (x) between 0.05 and 0.30.