Galvanometer Mirror Coating Layout for Beam Reflectivity and Smoothness

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Solution Overview

Problem

The reflectivity of galvanometer mirrors used in laser machines is reduced due to the degradation of layer smoothness caused by thickening, which affects the reflection of laser beams at machining points, leading to attenuation and energy loss.

Innovation Solution

A galvanometer mirror design featuring a transparent substrate with a multi-layered laser beam reflection layer and a high-refractivity machining point beam reflection layer, separated to enhance smoothness and reflectivity for specific wavelength ranges, using materials like synthetic quartz and metal films for improved reflectivity and thermal management.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If the second reflection layer is formed by stacking a layer for reflecting the laser beam on a layer for reflecting the beam from the machining point, then the reflectivity for both laser beam and machining point beam is improved, but the layer thickness increases and smoothness degrades, reducing reflectivity

Engineering Contradiction:
Improvebeam attenuationVSAvoidlayer smoothness
Core Design Contradiction:
Loss of energyVSManufacturing precision

Solution Approach 1:

The patent divides the reflection function into two separate layers: a first reflection layer for reflecting the laser beam and a second reflection layer for reflecting the machining point beam. By separating these functions into distinct layers rather than stacking them, the patent avoids excessive thickness accumulation while maintaining high reflectivity for both beam types.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies different reflection properties to different layers: the first reflection layer is optimized for laser beam reflection, while the second reflection layer is optimized for machining point beam reflection. Each layer has tailored optical properties (reflectivity, thickness, material composition) suited to its specific function, achieving high overall performance without compromising layer smoothness.

Inventive Principle:
Principle #3Local quality

2Loss of energy

If the layer is thickened to improve reflectivity for both laser beam and machining point beam, then energy loss is reduced, but the smoothness of the layer is degraded

Engineering Contradiction:
Improvebeam energy lossVSAvoidreflectivity
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent segments the reflection functionality into two separate reflection layers with distinct optimization goals. The first layer prioritizes laser beam reflection with appropriate thickness and material, while the second layer prioritizes machining point beam reflection. This segmentation allows each layer to achieve high reflectivity for its designated function without requiring excessive overall thickness that would degrade smoothness.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs composite material structures in the reflection layers, combining different materials with complementary optical properties. The first reflection layer uses materials optimized for laser beam interaction, while the second reflection layer uses materials optimized for machining point beam interaction. This composite approach achieves high reflectivity for both beam types while maintaining controlled thickness and smoothness.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design increases reflectivity for both predetermined and non-predetermined wavelengths, reducing energy loss and heat generation, while maintaining low thermal expansion and lightweight properties for efficient laser beam guidance and machining accuracy.

Implementation Method 1

a first reflection layer (laser beam reflection layer 62 described later, for example) arranged on one surface side of the substrate and causing reflection of a laser beam having a predetermined wavelength

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a second reflection layer (machining point beam reflection layer 64 described later, for example) arranged on the other surface side of the substrate and having higher reflectivity for a beam having a wavelength except the predetermined wavelength than the first reflection layer

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS11402553B2Galvanometer mirror and laser machine
Publication Date: 2022.08.02 FANUC LTD
  • US11402553B2 patent drawing
  • US11402553B2 patent drawing
  • US11402553B2 patent drawing

AI summary

A galvanometer mirror according to the present invention comprises: a transparent substrate; a laser beam reflection layer arranged on one surface side of the substrate and causing reflection of a laser beam having a predetermined wavelength; and a machining point beam reflection layer arranged on the other surface side of the substrate and having higher reflectivity for a beam having a wavelength except the predetermined wavelength than the laser beam reflection layer.