Galvanometer Mirror Pupil Conjugate Optical System
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Solution Overview
Problem
Existing scanning optical systems with lenses of different powers at the intermediate image plane suffer from noise images due to flaws and foreign matter, and astigmatism occurs when the lens is positioned elsewhere.
Innovation Solution
The system employs anamorphic optical elements with different powers in two scanning directions, placed at a spaced interval from the intermediate image plane, to maintain a pupil conjugate relationship between galvanometer mirrors without causing astigmatism, effectively preventing noise from flaws and foreign matter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a lens with different powers in the scanning directions is disposed at the intermediate image plane, then the two galvanometer mirrors are placed in a pupil conjugate relationship, but flaws and foreign matter on the lens produce noise images
Solution Approach 1:
The single anamorphic lens is divided into two separate anamorphic optical elements positioned at different locations. The first element is placed at the intermediate image plane to establish pupil conjugate relationship, while the second element is positioned away from the intermediate image plane to avoid producing noise images from flaws and foreign matter.
Solution Approach 2:
The second anamorphic optical element acts as an intermediary component that maintains the optical power needed for pupil conjugate relationship while being positioned away from the intermediate image plane. This intermediary element prevents direct contact between flaws/foreign matter at the intermediate image plane and the light beam, thereby eliminating noise image production.
2Object-affected harmful factors
If the lens is disposed at a position spaced from the intermediate image plane, then noise images from flaws and foreign matter are removed, but astigmatism occurs
Solution Approach 1:
The optical system is segmented into two separate anamorphic optical elements with different positioning strategies. The first element is precisely positioned at the intermediate image plane to control astigmatism, while the second element is positioned away from the intermediate image plane to eliminate noise images, thereby distributing the functional requirements across two components.
Solution Approach 2:
Different regions of the optical system are assigned different qualities and positioning requirements. The first anamorphic optical element is placed at the intermediate image plane with specific optical power to control astigmatism locally, while the second element is positioned away from the intermediate image plane to locally eliminate noise image production, with each element optimized for its specific location and function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This arrangement ensures that the galvanometer mirrors remain in a pupil conjugate relationship, preventing astigmatism and noise from flaws and foreign matter, while maintaining image quality.
Implementation Method 1
A plurality of optical elements are disposed in positions spaced from an intermediate image plane in the optical axis direction and have different optical powers in the two scanning directions
Implementation Method 2
An objective lens focuses the light beam scanned by the scanning means onto a target
Data Source
AI summary
The disclosed technology is directed to placing two galvanometer mirrors in a pupil conjugate relationship and at the same time preventing astigmatism from occurring while preventing images from being degraded by flaws and foreign matter on a lens. A scanning optical system includes two one-dimensional scanning means disposed closely to each other at a spaced interval therebetween in an optical axis direction for scanning a light beam from a light source in two scanning directions. An objective lens for focusing the light beam scanned by the scanning means onto a target. A plurality of optical elements is disposed in positions spaced from an intermediate image plane in the optical axis direction and having different optical powers in the two scanning directions. The positions and the optical powers of the respective optical elements are set to compensate for the spaced interval between the two scanning means in the optical axis direction.