GaN Cladding Layer for Semiconductor Laser Heat Dissipation

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Solution Overview

Problem

Semiconductor laser devices formed on silicon-on-insulator (SOI) substrates face heat dissipation issues due to the silicon oxide layer, leading to device deterioration.

Innovation Solution

A semiconductor laser device is designed with a gallium nitride (GaN) cladding layer that enhances heat conductivity, along with a light waveguide structure and electrode configuration, including separate confinement heterostructure (SCH) patterns, to effectively manage heat and improve device performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a silicon oxide layer is used as substrate for semiconductor laser device, then manufacturing ease is improved, but heat dissipation capability deteriorates

Engineering Contradiction:
Improvesubstrate manufacturing easeVSAvoidheat dissipation capability
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The patent employs a composite substrate structure combining silicon oxide layer with gallium nitride cladding layers. The silicon oxide provides manufacturing advantages while the GaN cladding layers provide superior thermal conductivity, creating a composite material system that simultaneously achieves ease of manufacture and effective heat dissipation.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The invention introduces gallium nitride cladding layers with high thermal conductivity at specific locations (adjacent to the laser diode structure) where heat generation occurs. This local enhancement of thermal properties addresses the heat dissipation problem without compromising the overall manufacturing ease of the silicon oxide substrate.

Inventive Principle:
Principle #3Local quality

2Temperature

If gallium nitride cladding layer is added to improve heat dissipation, then heat dissipation capability is improved, but device complexity increases

Engineering Contradiction:
Improveheat dissipation capabilityVSAvoidstructure complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The gallium nitride cladding layers serve multiple functions simultaneously: they provide high thermal conductivity for heat dissipation, act as optical confinement structures for the laser mode, and function as structural support layers. This multi-functionality reduces the need for additional separate heat dissipation components, thereby limiting the increase in device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the heat dissipation function with the existing optical waveguide and confinement structure by using gallium nitride material for the cladding layers. This consolidation integrates thermal management into the optical structure rather than adding separate thermal management components, thus improving heat dissipation while controlling device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively discharges heat generated by the semiconductor laser source, enhancing the device's characteristics and preventing deterioration, compared to conventional devices on SOI substrates.

Implementation Method 1

a first cladding on a substrate, the first cladding including gallium nitride (GaN)... effectively discharges heat generated by the semiconductor laser source

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS11233374B2Semiconductor laser device and method of manufacturing the same
Publication Date: 2022.01.25 SAMSUNG ELECTRONICS CO LTD
  • US11233374B2 patent drawing
  • US11233374B2 patent drawing
  • US11233374B2 patent drawing

AI summary

A semiconductor laser device includes a first cladding including gallium nitride (GaN) on a substrate, a light waveguide on the first cladding, a first contact pattern, a first SCH pattern, a first active pattern, a second SCH pattern, a second cladding and a second contact pattern sequentially stacked on the light waveguide, and first and second electrodes on the first and second contact patterns, respectively.