GaN Semiconductor Electron Blocking Layer Stress Management

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Solution Overview

Problem

Gallium nitride (GaN) based blue-violet semiconductor lasers face excessive physical stress due to electron blocking layers, leading to potential cracking, which is not adequately addressed by repositioning the layers away from the multi-quantum well active layer.

Innovation Solution

Implementing an electron blocking layer with a specific composition of group III and group V elements, separated from the active layer by a p-side waveguide layer, and a cladding sublayer with a lower aluminum content than the electron blocking layer, reducing lattice mismatches and physical stress.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If an electron blocking layer is implemented in GaN based semiconductor lasers, then the threshold current is reduced and maximum output power is increased, but excessive physical stress is induced on the active layer causing cracking

Engineering Contradiction:
Improvemaximum output powerVSAvoidresistance to cracking
Core Design Contradiction:
PowerVSStrength

Solution Approach 1:

A composition gradient layer is introduced between the electron blocking layer and the active layer to serve as an intermediary that gradually transitions the lattice constant from the high-stress electron blocking layer material to the low-stress active layer material. This gradient structure acts as a stress buffer, preventing the transmission of excessive physical stress to the active layer while maintaining the electron blocking function.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The composition of the gradient layer is designed to vary continuously or in steps, changing the concentration of group III elements to create a progressive transition in lattice constant. This parameter change approach allows the structure to accommodate lattice mismatch gradually, reducing the peak stress concentration that would otherwise occur at sharp material interfaces.

Inventive Principle:
Principle #35Parameter changes

2Strength

If the electron blocking layer is moved away from the MQW active layer into the p-side waveguide layer, then physical stress on the active layer is reduced, but stress induced cracking still occurs

Engineering Contradiction:
Improveresistance to crackingVSAvoidcrack prevention
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The composition gradient layer functions as a mediator that bridges the electron blocking layer and the active layer, allowing the electron blocking layer to be positioned in the p-side waveguide layer while still providing stress protection. The gradient layer's varying composition creates a gradual lattice constant transition that prevents stress concentration, thereby mediating between the structural requirements and stress management needs.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Power

If an electron blocking layer with high aluminum content is used, then electron blocking efficiency is improved, but lattice mismatch with GaN layers increases causing excessive stress

Engineering Contradiction:
Improveelectron blocking efficiencyVSAvoidphysical stress
Core Design Contradiction:
PowerVSStress or pressure

Solution Approach 1:

The gradient layer introduces a spatial variation in material composition, creating different local properties at different positions. Near the electron blocking layer, the composition is optimized for lattice matching, while near the active layer, it transitions to match the GaN lattice constant. This local quality variation allows the structure to accommodate high aluminum content for electron blocking while managing stress through compositional adjustment.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The aluminum content parameter is varied continuously or in discrete steps through the gradient layer thickness, transitioning from high aluminum content (for electron blocking) to low aluminum content (for lattice matching with GaN). This parameter change strategy enables the structure to achieve both high electron blocking efficiency and reduced lattice mismatch stress.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for effective electron blocking without inducing excessive physical stress, maintaining lower threshold current and preventing cracking in GaN based semiconductor lasers.

Implementation Method 1

The electron blocking layer, thereby, forms a potential barrier that acts to suppress the flow of electrons from the MQW active layer

Methodology Applied
Scientific EffectPotential barrier:

Implementation Method 2

The cladding layers act to further restrict the generated light to the MQW active layer of the semiconductor laser

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 3

Some of these injected electrons and holes are trapped by the quantum wells and recombine, generating photons of light

Methodology Applied
Scientific EffectQuantum confinement:

Data Source

PatentUS7804869B2Gallium nitride based semiconductor device with electron blocking layer
Publication Date: 2010.09.28 AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LTD
  • US7804869B2 patent drawing
  • US7804869B2 patent drawing
  • US7804869B2 patent drawing

AI summary

A semiconductor device comprises an n-side waveguide layer, an active layer in contact with the n-side waveguide layer and a p-side waveguide layer in contact with the active layer. An electron blocking layer is in contact with the p-side waveguide layer and comprises a first composition of two elements from group III of the periodic table and an element from group V of the periodic table. A cladding layer includes a cladding sublayer that is in contact with the electron blocking layer. The cladding sublayer comprises a second composition of two elements from group III of the periodic table and an element from group V of the periodic table. The second composition is different from the first composition.