GaN HEMT n-type Doping Shields 2DEG from Traps

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Solution Overview

Problem

GaN FETs face instabilities due to traps in semiconductor layers below the two-dimensional electron gas, leading to undesirable operational instabilities.

Innovation Solution

Incorporating n-type doping in III-N semiconductor layers below the two-dimensional electron gas to shield it from trapped changes and image charges, with a sheet charge carrier density that effectively screens these issues.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If n-type doping is added to III-N semiconductor layers below the two-dimensional electron gas, then the two-dimensional electron gas is shielded from trapped charges and image charges, but the device structure becomes more complex

Engineering Contradiction:
Improvestability of two-dimensional electron gasVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

An n-type doped III-N semiconductor layer is introduced as an intermediary between the two-dimensional electron gas and the underlying semiconductor layers containing traps. This intermediary layer with sheet charge carrier density shields the two-dimensional electron gas from trapped charges and image charges, resolving the stability issue without requiring modification of the two-dimensional electron gas itself

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent modifies the electrical parameters of the III-N semiconductor layer by introducing n-type doping with specific sheet charge carrier density. This parameter change creates a shielding effect that stabilizes the two-dimensional electron gas while maintaining the overall device structure

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach stabilizes the two-dimensional electron gas, reducing operational instabilities and enhancing the performance of GaN FETs by shielding them from trapped charges and image charges.

Implementation Method 1

A sheet charge carrier density of the n-type doping shields the two-dimensional electron gas from trapped charges and image charges below the two-dimensional electron gas

Methodology Applied
Scientific EffectElectrostatic screening: Electrostatics

Data Source

PatentUS8759879B1RESURF III-nitride HEMTs
Publication Date: 2014.06.24 TEXAS INSTRUMENTS INC
  • US8759879B1 patent drawing
  • US8759879B1 patent drawing
  • US8759879B1 patent drawing

AI summary

A semiconductor device containing a GaN FET has n-type doping in at least one III-N semiconductor layer of a low-defect layer and an electrical isolation layer below a barrier layer. A sheet charge carrier density of the n-type doping is 1 percent to 200 percent of a sheet charge carrier density of the two-dimensional electron gas.