GaN Laser Contact Patterning for High-Power Single-Mode Beams

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Solution Overview

Problem

The development of high-power, single-mode, and single-frequency GaN semiconductor lasers is hindered by limitations in mode quality and brightness due to filamentation and thermal lensing, particularly at higher power levels, where conventional devices struggle to maintain single lateral and longitudinal mode operation while achieving multi-watt output.

Innovation Solution

The implementation of patterned n-type contact regions and novel transfer techniques in GaN-based laser diodes, including tapered waveguide designs with distributed-feedback structures, to control current injection patterns and reduce filamentation, thereby enhancing mode quality and beam brightness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If conventional GaN laser diodes operate at higher power levels, then output power increases, but mode quality deteriorates due to filamentation and thermal lensing

Engineering Contradiction:
Improveoutput powerVSAvoidmode quality
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The patent applies local quality by implementing a patterned contact structure with different regions (first contact region, second contact region, and third contact region) that have different doping concentrations and geometries. This creates localized variations in current density distribution, preventing filamentation in high-power operation while maintaining overall high output power. The first contact region has higher doping concentration to handle high current density, while other regions have lower doping to control thermal effects.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The contact structure is segmented into multiple distinct regions (first, second, and third contact regions) with different electrical and geometric characteristics. This segmentation allows independent optimization of each region's function: the first region provides high-current injection, while the second and third regions control thermal lensing and maintain beam quality, enabling simultaneous achievement of high power and good mode quality.

Inventive Principle:
Principle #1Segmentation

2Reliability

If patterned contact structures are implemented to control current injection, then mode quality improves, but device complexity increases

Engineering Contradiction:
Improvemode qualityVSAvoidcontact structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent utilizes parameter changes by varying the doping concentration, geometry, and electrical properties of different contact regions to achieve optimal current distribution. The first contact region uses higher doping concentration (e.g., 1e19 to 1e21 atoms/cm³) while the second and third regions use lower doping (e.g., 1e17 to 1e19 atoms/cm³), creating the desired current injection pattern without requiring complex external control mechanisms.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If heteroepitaxial growth on foreign substrates is used to avoid native substrate limitations, then manufacturing feasibility improves, but defect density increases

Engineering Contradiction:
Improvemanufacturing feasibilityVSAvoiddefect density
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent applies local quality by implementing a patterned contact structure with different regions (first contact region, second contact region, and third contact region) that have different doping concentrations and geometries. This creates localized variations in current density distribution, preventing filamentation in high-power operation while maintaining overall high output power. The first contact region has higher doping concentration to handle high current density, while other regions have lower doping to control thermal effects.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The contact structure is segmented into multiple distinct regions (first, second, and third contact regions) with different electrical and geometric characteristics. This segmentation allows independent optimization of each region's function: the first region provides high-current injection, while the second and third regions control thermal lensing and maintain beam quality, enabling simultaneous achievement of high power and good mode quality.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach improves the reliability and beam quality of high-power GaN lasers by reducing catastrophic optical damage, achieving higher output powers with stable, single-mode operation and enhanced brightness, suitable for applications requiring high power and precise spectral control.

Implementation Method 1

The implementation of patterned n-type contact regions and novel transfer techniques in GaN-based laser diodes, including tapered waveguide designs with distributed-feedback structures, to control current injection patterns

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 2

tapered waveguide designs with distributed-feedback structures, to control current injection patterns and reduce filamentation, thereby enhancing mode quality and beam brightness

Methodology Applied
Scientific EffectOptical waveguide: Waveguide (optics)

Implementation Method 3

tapered waveguide designs with distributed-feedback structures

Methodology Applied
Scientific EffectOptical feedback: Feedback

Data Source

PatentUS20240380187A1High power gallium and nitrogen containing laser diode devices with improved mode quality
Publication Date: 2024.11.14 KYOCERA SLD LASER INC
  • US20240380187A1 patent drawing
  • US20240380187A1 patent drawing
  • US20240380187A1 patent drawing

AI summary

According to the present invention, techniques for high power gallium and nitrogen containing laser diode devices are provided. Such high power devices include straight lasers, tapered lasers, distributed feedback lasers, distributed Bragg reflector laser devices, and master oscillator power amplifier devices, among others configured with improved mode quality.