GaN Semiconductor Laser Groove Design for Stable Self-Pulsation

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Solution Overview

Problem

GaN-based semiconductor lasers for high-density optical disk systems face instability in self-pulsation operation due to insufficient carrier lifetime in the saturable absorbing layer, making stable and long-lasting self-pulsation difficult to achieve.

Innovation Solution

Introducing damage to the saturable absorbing layer through dry etching to shorten carrier lifetime, specifically by forming grooves between the active and saturable absorbing layers with precise distance control, where the distance from the bottom surfaces of the grooves to the upper surface of the active layer is not less than 105 nm and to the upper surface of the saturable absorbing layer is not more than 100 nm, maximizing the mean time to failure and enabling stable self-pulsation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a saturable absorbing layer is provided at a light guide layer or clad layer to enable self-pulsation operation, then self-pulsation operation can be achieved, but the operation becomes unstable against temperature changes

Engineering Contradiction:
Improveself-pulsation operationVSAvoidtemperature stability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent applies local quality by creating grooves at specific locations within the semiconductor laser structure. The grooves are formed in the light guide layer or clad layer at predetermined positions to locally modify carrier recombination characteristics. This localized modification enables self-pulsation operation while maintaining temperature stability, as the grooves create specific regions with enhanced carrier capture capability without affecting the overall thermal characteristics of the device.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements preliminary action by pre-forming grooves during the manufacturing process before the device is put into operation. These grooves are created using selective etching or growth techniques during fabrication, establishing the necessary structural features that will enable stable self-pulsation operation under various temperature conditions. The grooves are positioned and dimensioned in advance to optimize carrier lifetime control.

Inventive Principle:
Principle #10Preliminary action

2Ease of operation

If the thickness of saturable absorbing layer or light confinement coefficient is adjusted to enable self-pulsation, then self-pulsation operation can be achieved, but stable operation cannot be reliably obtained

Engineering Contradiction:
Improveself-pulsation operationVSAvoidoperational stability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

Instead of uniformly adjusting the thickness of the saturable absorbing layer throughout the entire device, the patent applies local quality by forming grooves at specific locations. These grooves create localized regions with modified optical and electrical properties, enabling self-pulsation operation through concentrated carrier capture at the groove sites while maintaining overall structural integrity and temperature stability.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements parameter changes by modifying the physical dimensions and positions of grooves within the semiconductor laser structure. By controlling the depth, width, and spacing of the grooves, the carrier lifetime can be precisely adjusted to enable self-pulsation operation. The groove parameters are optimized to achieve the desired balance between self-pulsation capability and temperature stability.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If dry etching is used to form grooves and control transverse mode, then transverse mode control is improved, but carrier lifetime reduction in saturable absorbing layer is insufficient

Engineering Contradiction:
Improvetransverse mode controlVSAvoidcarrier lifetime
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent applies local quality by forming grooves that extend into the saturable absorbing layer from the light guide layer or clad layer. These grooves create localized regions of enhanced carrier capture capability within the saturable absorbing layer, directly addressing the insufficient carrier lifetime issue. The grooves are positioned to overlap with the saturable absorbing layer region, ensuring effective carrier lifetime reduction while maintaining transverse mode control.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements another dimension by extending the grooves vertically through multiple layers of the semiconductor laser structure. The grooves penetrate from the light guide layer or clad layer down into the saturable absorbing layer, creating a three-dimensional structure that simultaneously achieves transverse mode control and carrier lifetime reduction. This vertical extension into the depth dimension enables dual functionality.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for a semiconductor laser capable of stable self-pulsation with a long life, enhancing the reliability and performance of GaN-based semiconductor lasers, which can be used in optical pickups and disk apparatuses as a light source.

Implementation Method 1

Introducing damage to the saturable absorbing layer through dry etching to shorten carrier lifetime

Methodology Applied
Scientific EffectDry etching:

Implementation Method 2

the promotion of recombination of carriers at the interface between the p-type AlGaN layer and the saturable absorbing layer

Methodology Applied
Scientific EffectCarrier recombination: Absorption (physical)

Data Source

PatentUS7606278B2Semiconductor laser, method of manufacturing semiconductor device, optical pickup, and optical disk apparatus
Publication Date: 2009.10.20 SONY GROUP CORP
  • US7606278B2 patent drawing
  • US7606278B2 patent drawing
  • US7606278B2 patent drawing

AI summary

Disclosed herein is a semiconductor laser including: a first clad layer of a first conduction type; an active layer over said first clad layer; a saturable absorbing layer over said active layer; and a second clad layer of a second conduction type over said saturable absorbing layer; at least said second clad layer being provided with a pair of grooves parallel to each other with a predetermined spacing therebetween so as to form a ridge stripe therebetween. In the semiconductor laser, the distance from bottom surfaces of said grooves to an upper surface of said active layer is not less than 105 nm, and the distance from said bottom surfaces of said grooves to an upper surface of said saturable absorbing layer is not more than 100 nm.