GaN Schottky Diode PN Junction Electric Field Modulation

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Solution Overview

Problem

Conventional gallium nitride-based Schottky diodes face challenges in achieving high breakdown voltage due to non-uniform electric field distribution, leading to potential substrate and layer breakdown, especially when using a silicon substrate, which also has limitations in heat conduction and cost.

Innovation Solution

A Schottky diode structure is proposed with a P-type gallium nitride layer formed on a substrate, followed by an N-type gallium nitride layer and a Schottky electrode, creating a PN junction that reduces surface electric field peaks and smoothes distribution, increasing breakdown voltage through charge equilibrium and a buffer layer to mitigate lattice mismatch.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a thicker gallium nitride layer is used to increase breakdown voltage, then the breakdown voltage increases, but the cost increases and crystal dislocation occurs due to lattice mismatch

Engineering Contradiction:
Improvebreakdown voltageVSAvoidcost and manufacturing complexity
Core Design Contradiction:
StrengthVSEase of manufacture

Solution Approach 1:

The gallium nitride layer is segmented into multiple layers with different doping types (P-type, N-type, N+-type) arranged in sequence. This segmentation allows each layer to serve specific functions: the P-type and N-type layers form a PN junction for electric field modulation, while the N+-type layer provides low resistance contact. This resolves the contradiction by achieving high breakdown voltage through structured layering rather than simply increasing overall thickness, thereby reducing cost and manufacturing complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the gallium nitride structure are assigned different doping types and concentrations to create localized functional zones. The P-type region provides hole carriers, the N-type region provides electron carriers, and the N+-type region provides high conductivity for current flow. This local quality differentiation allows the structure to achieve high breakdown voltage through optimized electric field distribution rather than uniform thickness increase, resolving the cost and complexity issue.

Inventive Principle:
Principle #3Local quality

2Ease of manufacture

If the N-type gallium nitride layer is made thinner to reduce cost, then the cost decreases, but the breakdown voltage decreases and substrate breakdown occurs

Engineering Contradiction:
ImprovecostVSAvoidbreakdown voltage
Core Design Contradiction:
Ease of manufactureVSStrength

Solution Approach 1:

A P-type gallium nitride layer is introduced as an intermediary between the substrate and the N-type gallium nitride layer. This P-type layer forms a PN junction with the N-type layer, creating a transition zone that modulates the electric field distribution. The intermediary P-type layer allows the N-type layer to be thinner while still achieving high breakdown voltage by preventing direct electric field concentration at the substrate interface, thus resolving the contradiction between cost and breakdown voltage.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The doping type and concentration parameters are changed by introducing P-type and N+-type regions alongside the N-type region. This parameter change transforms the structure from a simple single-layer N-type design to a multi-layer PN junction structure. The parameter changes enable electric field modulation that allows thinner N-type layers to achieve the same or higher breakdown voltage, resolving the contradiction between cost (thinner layer) and performance (breakdown voltage).

Inventive Principle:
Principle #35Parameter changes

3Device complexity

If a conventional single-layer N-type structure is used, then the structure is simple, but the electric field distribution is non-uniform leading to premature breakdown

Engineering Contradiction:
Improvestructure simplicityVSAvoidbreakdown voltage
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The single-layer N-type structure is segmented into multiple layers with different doping types (P-type, N-type, N+-type). This segmentation creates distinct functional zones that work together to modulate the electric field. The P-type and N-type layers form a PN junction that distributes the electric field more uniformly, preventing concentration at any single point. This resolves the contradiction by showing that controlled complexity (multiple layers) actually improves reliability while maintaining reasonable structural simplicity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The structure uses a composite of gallium nitride layers with different doping types (P-type, N-type, N+-type) to create a PN junction diode. This composite structure combines the advantages of different doping types: the P-type provides hole carriers for electric field modulation, the N-type provides electron carriers, and the N+-type provides low resistance pathways. The composite nature allows uniform electric field distribution and high breakdown voltage while maintaining a relatively simple overall structure, resolving the contradiction between simplicity and reliability.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively increases breakdown voltage, enhances electric field uniformity, and improves the reliability of the Schottky diode by reducing peak electric field strength and increasing the drift region length, thus expanding the operating voltage range.

Implementation Method 1

The PN junction formed from the P-type gallium nitride layer and the N-type gallium nitride layer can efficiently lower the surface electric field of the Schottky diode and smooth the distribution thereof under a reverse bias

Methodology Applied
Scientific EffectElectric field distribution: Electric Field

Implementation Method 2

When the peak strength is greater than the breakdown voltage of the N-type gallium nitride layer, or when the electric field strength in the substrate is greater than the breakdown voltage of the substrate, the Schottky diode breaks down

Methodology Applied
Scientific EffectBreakdown voltage: Avalanche Breakdown

Implementation Method 3

a Schottky contact is formed between the Schottky electrode 6 and the N-type gallium nitride layer 4

Methodology Applied
Scientific EffectSchottky contact: Diode

Data Source

PatentUS8436361B2Schottky diode structure and method for fabricating the same
Publication Date: 2013.05.07 NATIONAL TSING HUA UNIVERSITY
  • US8436361B2 patent drawing
  • US8436361B2 patent drawing
  • US8436361B2 patent drawing

AI summary

A Schottky diode structure and a method for fabricating the same, which are based on the principle of charge compensation, wherein a P-type gallium nitride layer is added to a Schottky diode structure, and wherein the PN junction of the P-type gallium nitride layer and the N-type gallium nitride layer decreases the non-uniformity of the surface electric field distribution, whereby the breakdown voltage of the element is raised.