GaN Coupled Waveguide Lasers With N-Cladding DFB Gratings

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Solution Overview

Problem

Fabrication of GaN-based DFB lasers is challenging due to difficulties in electrical activation of buried p-type layers, sensitivity of p-type GaN to point defects, and high p-type contact resistance, leading to increased forward voltage and optical losses, especially when etching DFB gratings into p-type layers.

Innovation Solution

The method involves transferring gallium and nitrogen-containing epitaxial layers from their original substrate to a carrier wafer, inverting the epitaxial stack to expose n-type cladding layers, and etching DFB gratings into the n-cladding region, which reduces the impact on conductivity and resistance, and using dielectric layers for optical coupling to provide efficient optical elements at a lower cost.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If DFB gratings are etched into p-type GaN layers, then optical feedback is achieved for narrow lasing spectrum, but p-type GaN becomes resistive and contact resistance increases

Engineering Contradiction:
Improvelasing spectrum widthVSAvoidelectrical conductivity
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent inverts the conventional approach by etching DFB gratings into n-type cladding layers instead of p-type contact layers. This inversion allows the grating structure to be formed in a layer that is less sensitive to point defects and does not compromise the electrical contact performance, thereby achieving narrow lasing spectrum without increasing contact resistance

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent extracts the DFB grating function from the p-type contact layer and relocates it to the n-type cladding layer. This separation allows the p-type contact layer to maintain its electrical function while the n-type layer provides the optical feedback mechanism through the etched grating structure

Inventive Principle:
Principle #2Taking out (Extraction)

2Measurement precision

If large fraction of p-type contact layer is removed to form grating, then optical feedback is improved, but forward voltage increases

Engineering Contradiction:
Improvelasing spectrum widthVSAvoidforward voltage
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

Instead of removing material from the p-type contact layer to create the grating, the patent inverts the approach by forming the grating in the n-type cladding layer. This preserves the integrity and low resistance of the p-type contact layer, thereby maintaining lower forward voltage operation while still achieving the desired optical feedback

Inventive Principle:
Principle #13The other way round (Inversion)

3Measurement precision

If regrown DFB gratings are used, then optical index contrast is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveoptical index contrastVSAvoidfabrication process steps
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the grating formation process from the complex regrowth sequence and integrates it into the standard etching workflow. By forming gratings in the n-type cladding layer through conventional etching techniques, the need for additional regrowth steps is eliminated, reducing manufacturing complexity while maintaining sufficient optical index contrast

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Instead of using regrowth to create contrasting index layers, the patent uses the existing n-type cladding layer structure and modifies it through etching. This approach copies the successful simple etching process from p-type layer fabrication and adapts it for grating formation, avoiding the complexity of regrowth processes

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of high-performance laser diodes with reduced optical losses and lower forward voltage, while also offering a cost-effective method for manufacturing devices suitable for various applications including lighting, communication, and sensing systems.

Implementation Method 1

transferring gallium and nitrogen-containing epitaxial layers from their original substrate to a carrier wafer

Methodology Applied
Scientific EffectEpitaxial transfer: Epitaxy

Implementation Method 2

etching DFB gratings into the n-cladding region

Methodology Applied
Scientific EffectPlasma etching: Plasma

Implementation Method 3

using dielectric layers for optical coupling to provide efficient optical elements

Methodology Applied
Scientific EffectOptical coupling: Waveguide (optics)

Data Source

PatentUS20240413614A1Manufacturable gallium and nitrogen containing coupled waveguide devices
Publication Date: 2024.12.12 KYOCERA SLD LASER INC
  • US20240413614A1 patent drawing
  • US20240413614A1 patent drawing
  • US20240413614A1 patent drawing

AI summary

The present disclosure provides optical devices and methods for forming the optical devices. In some embodiments, the optical devices include active and passive regions. The active regions may include gallium and nitrogen containing epitaxial material, and the passive regions may include waveguide structures. The active and passive regions may be arranged on a carrier wafer in an end-to-end configuration. In other embodiments, the optical devices include laser devices or gain regions and dielectric waveguides. The laser devices or gain regions may include gallium and nitrogen containing epitaxial material.