Gantry Apparatus Web Structure for Optical Sagging
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Solution Overview
Problem
Large display substrates require increased optical systems, leading to sagging issues due to weight, which deteriorates exposure or inspection precision and results in defective substrates.
Innovation Solution
A gantry apparatus with a web-shaped structure comprising intersecting first and second plates, coupled with a rigidity enhancing member, and a drive device with a moving unit and coupling ring, allowing for effective layout and minute adjustment of optical systems to enhance mechanical rigidity and reduce sagging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of optical systems is increased to process larger substrates, then the processing capability is improved, but the weight of the structure increases causing sagging and deteriorating precision
Solution Approach 1:
The structure is divided into multiple modular units including first plates, second plates, and support members that can be independently configured. This segmentation allows the system to support multiple optical systems while maintaining structural integrity and minimizing sagging through distributed load bearing.
Solution Approach 2:
The structure employs composite construction with multiple plate materials and support members of different properties. The combination of first plates, second plates, and support members creates a composite structure that optimizes both load-bearing capacity and dimensional stability to prevent sagging.
2Area of stationary object
If more optical systems are coupled to the structure, then the substrate coverage is improved, but the structural rigidity deteriorates due to increased weight
Solution Approach 1:
The structure transitions from a planar configuration to a three-dimensional framework using vertically extending support members and multi-level plate arrangements. This dimensional expansion provides additional structural support pathways that maintain rigidity while accommodating multiple optical systems across larger substrate areas.
Solution Approach 2:
The support members and plate structure are pre-configured to provide rigidity enhancement before the optical systems are fully installed. This preliminary structural preparation ensures that the framework can bear the anticipated weight of multiple optical systems without sagging, maintaining both substrate coverage and structural strength.
3Manufacturing precision
If the structure is made more rigid to prevent sagging, then the precision is improved, but the device complexity increases
Solution Approach 1:
The rigid structure is achieved through segmentation into standardized first plates, second plates, and support members rather than a monolithic complex design. Each segment is relatively simple in form but the collective arrangement provides the necessary rigidity, balancing precision requirements with manufacturing simplicity.
Data Source
AI summary
A gantry apparatus includes a structure to couple and support an optical system has enhanced rigidity, which minimizes deformation of the structure even if a plurality of optical systems is coupled to the structure. The gantry apparatus includes an optical system, a drive device to drive the optical system, and a structure to couple and support the drive device. The structure includes a plurality of first plates arranged parallel to one another, and a plurality of second plates intersecting the plurality of first plates to define receptive corridors, each of which receives the drive device.